KLA-TENCOR ASET-F5x Thin Film Measurement System

• Serial Number 0202802R
• Manufactured in June, 2002
• Inspection Modes Include:
  • Dual Beam Spectrometry
  • Spectroscopic Ellipsometry
  • Film Stress Analysis
  • SUMMIT™ Application Software Version 3.21.16
  • FTML Version 3.46.06
  • Model 300DFF1P Wafer Loading Platform
    • Dual Loadports for 300mm Wafers
    • Three Axis Wafer Handling Robot
    • GEM / SECS Communication
    • Inquire for Additional Details

KLA-TENCOR HRP-240 High Resolution Profiler

• Cassette to Cassette Wafer Handling for up to 200mm Wafers
• Previously Configured for SMIF Wafer Handling
• Please Inquire for Additional Details

TENCOR Surfscan 4500 Unpatterned Wafer Surface Inspection Tool

• Cassette to Cassette Handling of 3” – 6” Wafers
• New HeNe 2mW Laser, 632.8 nm Wavelength
• New HeNe Laser Power Supply
• 2 µ Particle Size Sensitivity
• Automatic Calibration
• Flatscreen Monitor
• System Calibrated & Demonstrated
• Calibration Standard Wafer Included

KLA-Tencor 2138XP Brightfield Defect Inspection Tool

• 0.25µ, 0.39µ, 0.62µ Spot Sizes
• For 150mm & 200mm Wafers
• Model 2552UI User Interface
• Denkenseiki Noise Filter
• Please Inquire for Additional Details

KLA-TENCOR Spectra fx Single Wave Ellipsometer Kit

KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

• ETAL Stage
• Yaskawa Robot with NXC100 Controller
• IDE Maxon 1000 Floatation Controller

KLA-Tencor AIT Patterned Wafer Inspection Tool

• Call for Details

KLA-TENCOR Puma 9130 Darkfield Inspection Tool

• Parts Tool
• Please Inquire for Additional Details

KLA-TENCOR Puma 9120 IS Darkfield Inspection Tool

• For 200mm or 300mm Wafers
• 2ea Cameras
• Please Inquire for Additional Details