Wafer Inspection Tools

Wafer inspection tools are essential for detecting defects and ensuring quality in semiconductor manufacturing. These tools support high precision and reliability in production processes.

  1. BioRad Q5

    Overlay Registration

    BioRad Q5

    Overlay Registration Tool - Has Been Upgraded to a Q6 CD Measurement, Single and Two-Axis Overlay Registration
  4. KLA-Tencor 2138XP Brightfield Inspection Tool

    Automatic Wafer Inspection Tools

    KLA-Tencor 2138XP Brightfield Inspection Tool

    KLA-Tencor 2138XP Brightfield Defect Inspection Tool

    • 0.25µ, 0.39µ, 0.62µ Spot Sizes
    • For 150mm & 200mm Wafers
    • Model 2552UI User Interface
    • Denkenseiki Noise Filter
    • Please Inquire for Additional Details
  5. KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    Overlay Registration

    KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    • ETAL Stage
    • Yaskawa Robot with NXC100 Controller
    • IDE Maxon 1000 Floatation Controller

Common Applications

Defect detection

Quality assurance in semiconductor manufacturing

Overlay measurement

Wafer surface inspection

Buying Guide

Wafer Inspection Tools Buying Guide

When selecting wafer inspection tools, consider the specific type of inspections they perform and their compatibility with existing production setups. These tools play a critical role in maintaining the quality and efficiency of semiconductor manufacturing.

Here are key factors to evaluate:

  • Check the tool's compatibility with your current wafer sizes and materials.
  • Verify the tool's configuration and available features for specific inspection needs.
  • Examine any included interfaces and ensure they integrate with your systems.
  • Assess the tool's condition and review any available maintenance and usage logs.

Frequently Asked Questions

What are wafer inspection tools?
Wafer inspection tools are used to detect defects and ensure quality in semiconductor manufacturing.
How do automatic inspection stations work?
These stations use advanced technology to automatically examine wafers for defects.
Are surplus wafer inspection tools reliable?
Surplus tools can be reliable if they are verified for condition and functionality.
What brands offer wafer inspection tools?
Brands like KLA-Tencor, Nikon, and BioRad offer wafer inspection tools.
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