BioRad Q5
CD Measurement, Single and Two-Axis Overlay Registration
Wafer inspection tools are essential for detecting defects and ensuring quality in semiconductor manufacturing. These tools support high precision and reliability in production processes.
CD Measurement, Single and Two-Axis Overlay Registration
Automatic Wafer Inspection Tools
Microscope Olympus MX61A (Märzhäuser) with TDK 12" Loadport,(TAS300 Type: E4A) and SPA 8" Loadport, Isel Roboter, WID120 Barcodereader. Tool PC with WIN7
Automatic Wafer Inspection Tools
BrightField Inspektionstool 25 cassette HW 200mm GEM/SECS and HSMS Model Enable .12 , .62, .39 Picels
ORS Upgrade done
Tool currently full installed at cleanroom (estimated time depending on areaneed)
Sister tool available!
Automatic Wafer Inspection Tools
KLA-Tencor 2138XP Brightfield Defect Inspection Tool
KLA-TENCOR Archer 200 AIM Overlay Metrology Tool
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