Overlay Metrology Tools

Overlay metrology tools are used to measure alignment errors on semiconductor wafers. These tools ensure high precision and reliability in semiconductor manufacturing processes.

  1. BioRad Q5

    Overlay Registration

    BioRad Q5

    Overlay Registration Tool - Has Been Upgraded to a Q6 CD Measurement, Single and Two-Axis Overlay Registration
  3. KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    Overlay Registration

    KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    • ETAL Stage
    • Yaskawa Robot with NXC100 Controller
    • IDE Maxon 1000 Floatation Controller

Common Applications

Semiconductor wafer inspection

Precision alignment verification

Overlay error measurement

Buying Guide

Overlay Metrology Tools Buying Guide

When acquiring surplus overlay metrology tools, ensuring precision and compatibility is paramount.

Consider the following factors to make an informed purchase:

  • Verify the tool's compatibility with your wafer sizes, typically supporting up to 200mm.
  • Check for upgrades or enhancements that improve measurement accuracy.
  • Examine the condition and maintenance history to ensure reliability.
  • Look for tools with necessary controllers or interfaces intact for seamless integration.

Frequently Asked Questions

What are overlay metrology tools used for?
They measure alignment errors on semiconductor wafers to ensure manufacturing accuracy.
What wafer sizes are compatible with overlay metrology tools?
They typically support wafers up to 200mm as described in the listings.
Which brands offer overlay metrology tools?
Brands like BioRad and KLA-TENCOR are known for these tools.
Are surplus overlay metrology tools reliable?
Yes, provided they have been well-maintained and verified for performance.
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