Ion Implantation & Beam Tools

Ion implantation and beam tools are essential for doping semiconductors with controlled ions. These tools enhance precision and efficiency in semiconductor production.

  5. AMAT E500

    High Current Implanters

    AMAT E500

    › Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP› OEM Serial ID?ES193741 U2› Completeness: Total/partial/Donor tool? Please list missing parts.Total› Date of first usage?NA› Technic special customized for Infineon?NA› Correct maintained?Yes› Any damages/deficits known?No› Manuals existing?No› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the tool › Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS› Useable for which products?8"  Thin Taiko wafers› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?Yes (source, electrode)› Procured from OEM or from second hand?From IR Singapore› Any refurbishments done?No› Any doubts that the tool is failure free useable for the next three years?Yes› Was there a significant system failure in the last three years?No› Any contaminations known?BF3, H2› IFX inventory200016809location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM
  6. Axcelis NV8250HT #941

    Medium Current Implanters

    Axcelis NV8250HT #941

    Equipment Konfiguration: Type:NV8250HTEnergy Config:0 - 250Kv MidcurrentSerialnumber:908Build Year:2002Date of first usage:buyed new from vendorCurrent Condition: GoodCE-Conformity:YesLocation:greyroomVoltage:208VCryo-Pumps:3x CTI/Edwards Onboard: OB-8Cryo-Kompressor:CTI 9650 Low-VoltageTurbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003CRough-Pumps:Edwards: without QDP40, not includedEndstation Rough-Pump:not includedWafersize:8inch(200mm)Clamp-Type:E-Chuck green with Non-µC ControllerWafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)Gasbox:Modular 5-String, 4x 2,0L SizeString1:Argon Carriergas; MFC Unit-1662 2sccm BF3String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3Beam-Profiler Type:Belt-DriveGear-Type's:Scan: Planetary  Tilt: PlanetarySource-Type:ELS4 IHC-Source without VaporizerHV-Transformer:Silicon-OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSolaris SUN AXI 4HE PH: 200978Second-WorkstationSolaris SUN Sparc5Software-Version:5.1.4.1Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 TypeNotes:Upper-Rack Panel missing Clean-Room Table missing on frontside all 4 wheels on oil-isolation transformer are broken Minor modifications on tool No Manual-Set/ no Spares include tool was used 24/7 full in production between 15 and 230kv Energy If required, tool can be inspected on site, but no Power
  7. Varian Kestrel 1520

    High Current Implanters

    Varian Kestrel 1520

    2)      Headline & DescriptionKestrel 15203)      How many units14)      Manufacture (if applicable)Varian Semiconductor5)      Condition (Very Good/like New/Never Used/Good/Fair/Poor)Good6)      Year of manufacture 20127)      W X H X D in cm276 x 227 x 6328)      Weight25800kg9)      Purchase Date201210)   Purchase Cost167132.2511) Net Book Value 12)   Function (New – Never used/Working/Tested Needs Repair/ Needs Repair/ Untested/System Incomplete )Tested need Service13)   Appearance (New/Like New/Excellent/Very Good/Good/Poor?)Very good14) LocationKulim15) FE/BE (FE/BE/Unknown)?BE  Additional details › Original Equipment Manufacturer? (Yes/No, if no please state the details ) No, modified to run Hygrogen beam for Infineon› Exact Model Type? (Yes/No, if no please state the details ) Kestrel 1520› OEM Serial ID?ES184258› Completeness: Total/partial/Donor tool? Please list missing parts.total› Date of first usage?2011 at IFKM› Technic special customized for Infineon?Yes, modified as proton implanter for infineon› Correct maintained?Yes› Any damages/deficits known?machine failed to boot up, CPU and machine no linking› Manuals existing?Yes› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the toolmidified to run Hydrogen beam, GC wafer› Any upgrades / extensions?no› Useable for which products?field stop› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?yes, machine EOS in year 2018› Procured from OEM or from second hand?relocation from IFAT› Any refurbishments done?No› Any doubts that the tool is failure free useable for the next three years?NA, EOS machine› Was there a significant system failure in the last three years?only CPU failure› Any contaminations known?no, only run hydrogen gas
  8. AXCELIS NV8200P

    Medium Current Implanters

    AXCELIS NV8200P

    MCINV8202

    › Original Equipment Manufacturer? Axcelis

    › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

    › A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

    › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

    › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

    › Date of first usage? 2006

    › Technic special customized for Infineon? We don’t use water cool for the platen.

    › Correct maintained? Yes.

    › Any damages/deficits known? No

    › Manuals existing? Yes.

    › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

    › Any upgrades / extensions? No.

    › Useable for which products? 8 inch product

    › Wafer size (if applicable)? 8 inch

    › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

    › Procured from OEM or from second hand? Second hand.

    › Any refurbishments done? No.

    › Any doubts that the tool is failure free useable for the next three years? No.

    › Was there a significant system failure in the last three years? No.

    › Any contaminations known? No

    › IFX Inventory number? 100001850

  9. AXCELIS NV8200P

    Medium Current Implanters

    AXCELIS NV8200P

    -MCINV8201

    › Original Equipment Manufacturer? Axcelis

    › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

    › OEM Serial ID?

    › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

    › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

    › Manufacturing date of the Equipment ?

    › Date of first usage? 2006

    › Technic special customized for Infineon? We don’t use water cool for the platen.

    › Correct maintained? Yes.

    › Any damages/deficits known? No

    › Manuals existing? Yes.

    › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

    › Any upgrades / extensions? No.

    › Useable for which products? 8 inch product

    › Wafer size (if applicable)? 8 inch

    › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

    › Procured from OEM or from second hand? Second hand.

    › Any refurbishments done? No.

    › Any doubts that the tool is failure free useable for the next three years? No.

    › Was there a significant system failure in the last three years? No.

    › Any contaminations known? No

    › IFX Inventory number? 100000605

Popular Manufacturers

Varian Kaufman & Robinson I AMAT Axcelis/Eaton Advanced Energy Axcelis Technologies

Common Applications

Semiconductor manufacturing

Silicon wafer doping

Microelectronics processing

Precision ion implantation

Buying Guide

Ion Implantation & Beam Tools Buying Guide

When selecting ion implantation and beam tools, it's crucial to consider factors specific to your semiconductor manufacturing needs.

A well-informed purchase decision can greatly influence the efficiency and precision of your production processes.

  • Verify the configuration and compatibility with your manufacturing requirements.
  • Examine the condition and maintenance history of the surplus equipment.
  • Check for included accessories, software, and documentation.
  • Confirm the tool's calibration and performance logs.

Frequently Asked Questions

What are ion implantation tools used for?
Ion implantation tools are used in semiconductor manufacturing to introduce impurities into silicon wafers to alter their electrical properties.
Can ion beam equipment improve manufacturing precision?
Yes, ion beam equipment provides high precision in directing ions, which is critical for accurate doping in semiconductor processes.
Are used ion implantation tools reliable?
Surplus ion implantation tools can be highly reliable if they are well-maintained and come with comprehensive usage records.
What brands offer ion implantation systems?
Popular brands offering ion implantation systems include Varian, Axcelis, AMAT, and Veeco.