Manufacturer: AMAT

  1. EPI 39 - AMAT EPI CENTURA

    Epitaxial Cluster Tools

    EPI 39 - AMAT EPI CENTURA

    Software Ver: B6.50

    CB1 Amps: 300A

    Vita Controller

    Flow Point Model: Nano Valve

    Gas Panel Type: Configurable

    Wafer Size: 200mm (with conversion kit 150mm is possible)

    M-Monitor: CRT

    3 Chambers ATM EPI

    With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

     Standard pneumatic waferlift

    Center Finding System: OTF

    Buffer robot: HP+

    Piezocon sensor: No

    VSB: Yes

    Wide Body LL

    Tool called "EPI39"

  3. AMAT E500

    High Current Implanters

    AMAT E500

    › Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP› OEM Serial ID?ES193741 U2› Completeness: Total/partial/Donor tool? Please list missing parts.Total› Date of first usage?NA› Technic special customized for Infineon?NA› Correct maintained?Yes› Any damages/deficits known?No› Manuals existing?No› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the tool › Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS› Useable for which products?8"  Thin Taiko wafers› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?Yes (source, electrode)› Procured from OEM or from second hand?From IR Singapore› Any refurbishments done?No› Any doubts that the tool is failure free useable for the next three years?Yes› Was there a significant system failure in the last three years?No› Any contaminations known?BF3, H2› IFX inventory200016809location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM
  4. Applied Materials Part Number 1410-01054

    Other Heaters

    Applied Materials Part Number 1410-01054

    Other Heaters in Heaters HEATER, INJECTION VALVE LIQ IN
  5. EPI Centura ACP 300mm "Yu Shan"

    Epitaxial Cluster Tools

    EPI Centura ACP 300mm "Yu Shan"

    Brand new and unused EPI Centura ACP 300 mm

    4 Chambers;  Chamber code RH3, Lamp type BNA8 R3Mainframe Configuration E4 Single, 4 Facet SC ENP BLK2, Loadport AMAT Standard 300mm, EPI Water Module LT Design. RP EPI

    Tool out of Project: "Yu Shan"

    The original rough IFX Equipment procurement value was ~10,3 M€

    Will be now sold for an attractive price.

     Equipment is... 

    ...brand new 

    ...never used  

    ...original packaged and crated 

    ...located in Asia 

    ...complete and fully functional 

    ...professional stored in Warehouse