Microscopes & Inspection Systems

Microscopes and inspection systems are crucial for examining semiconductor wafers and ensuring quality control. These tools provide high precision and reliability, enhancing the manufacturing outcomes.

  3. LEICA/REICHERT WAFER INSPECTION MICROSCOPE

    Wafer Inspection Microscopes

    LEICA/REICHERT WAFER INSPECTION MICROSCOPE

    Automated Wafer Inspection Microscope Brightfield/Darkfield/DIC With LEP motorized wafer transport system

  5. LEICA AUTOMATED WAFER INSPECTION MICROSCOPE

    Wafer Inspection Microscopes

    LEICA AUTOMATED WAFER INSPECTION MICROSCOPE

    Automated Wafer Inspection Microscope Brightfield/Darkfield, DIC, With LEP motorized wafer transport system

  6. Nikon Optiphot-150S Wafer Inspection Microscope

    Wafer Inspection Microscopes

    Nikon Optiphot-150S Wafer Inspection Microscope

    Nikon Optiphot-150S Wafer Inspection Microscope

    • 2.5X, 5X, 10X, 20X & 50X CF Plan Bright/Darkfield Objective Lenses
    • Binocular Head with CFWN 10X/20 WF Eyepieces
    • Wafer Stage for Use with Nikon NWL-641 Wafer Loader
    • 12V/50W Lamphouse with Internal Illumination Transformer
    • Nikon NWL-641M Wafer Loader & Wafer Transfer XYO Stage
    • Macro Inspection Capability
    • Also Available with Bright/Darkfield Objective Lenses 
    • Also Available with Ergo Trinocular Head and Color Camera
    • Also Available without NWL-641 Wafer Loader
  8. LEICA/REICHERT WAFER INSPECTION MICROSCOPE

    Wafer Inspection Microscopes

    LEICA/REICHERT WAFER INSPECTION MICROSCOPE

    Automated Wafer Inspection Microscope Brightfield/Darkfield With LEP motorized wafer transport system

  10. Nikon/Semprex Measuring Microscope

    Wafer Inspection Microscopes

    Nikon/Semprex Measuring Microscope

     NIKON/SEMPREX Wafer Measuring Microscope

    • 4 Position Turret
    • NIKON MPlan 2.5X, BDPlan 10X, 20X & 40X Objective Lenses
    • NIKON Binocular Viewing Head with 10X Widefield Eyepieces
    • NIKON Vertical Illuminator with 12V/50W Halogen Lamp Housing
      • Brightfield & Darkfield Channels
      • Dual Iris Apertures
      • NIKON Model UN Illumination Transformer
      • SEMPREX Microscope Stand
        • Specimen Stage 6” X 6.75”
          • 2ea Mitutoyo 164-136 Digital Micrometers for XY Measurement
          • 0-2” in X Axis & 0-1.5” in Y Axis; Resolution to 0.0001”
          • Mitutoyo 534-223-1 Digital Micrometer for Height Measurement
          • 0-1” in Z Axis; Resolution to 0.0001”
  11. Olympus MX80AF-F Wafer Inspection Microscope

    Wafer Inspection Microscopes

    Olympus MX80AF-F Wafer Inspection Microscope

    Olympus MX80AF-F Wafer Inspection Microscope

    • Autofocus Capability
    • Ludl Motorized Stage for up to 300mm Wafers
    • Bright/Darkfield Optics:
    • Motorized Turret with 6ea Objective Lenses:
      • 5X, 10X, 20X, 50X & 100X UMPlanFl BD P 
      • 150X LMPlan Apo BD  
      • Interference Contrast Optical System
      • Trinocular Viewing Head with Color CCD Camera & Monitor
  12. Olympus MX50 Wafer Inspection Microscope

    Wafer Inspection Microscopes

    Olympus MX50 Wafer Inspection Microscope

    OLYMPUS MX50A-F  Reflected Light Microscope

    • Five Position Motorized Turret with the Following Objective Lenses:
      • OLYMPUS MPlanFl N 5X/0.15 BD
      • OLYMPUS UMPlanFl 10X/0.30 BD
      • OLYMPUS LMPlanFl 20X/0.40 BD
      • OLYMPUS LMPlanFl 50X /0.50 BD
      • OLYMPUS Trinocular Head with 2ea OLYMPUS WH10X Eyepieces
        • OLYMPUS DBX Extension Tube with DIAGNOSTIC INST. 1.0X C Mount Adapter
        • PIXELINK PL-B777U Solid State Camera
        • Specimen Stage with 150mm X 150mm XY Travel
        • OLYMPUS MX-LSH Lamp House with 12V 100W Halogen Lamp
        • 100/115VAC 50/60Hz Input Voltage

Common Applications

Semiconductor wafer inspection

Film thickness measurement

Defect analysis

Quality control in manufacturing

Buying Guide

Microscopes & Inspection Systems Buying Guide

Choosing the right microscope or inspection system involves considering specific industry needs and compatibility requirements.

Make sure to assess system configurations and ensure they match your wafer size and defect inspection requirements.

  • Confirm the system's compatibility with your wafer sizes, such as 200mm or 300mm.
  • Check the condition and calibration status to ensure accurate measurements.
  • Review any included software for compatibility with existing setups.
  • Verify the availability of manuals and service logs to understand maintenance history.

Frequently Asked Questions

What is the primary use of semiconductor microscopes?
They are used for detailed examination and quality assurance of semiconductor wafers.
Can these systems handle 300mm wafers?
Yes, some microscopes and inspection systems are designed for 300mm wafer compatibility.
What types of defects can be detected?
These systems can detect surface defects, film thickness variations, and other anomalies.
Are surplus inspection systems reliable?
Surplus systems can be reliable if they have been well-maintained and calibrated.
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