Plasma Etching Systems

Plasma etching systems use ionized gases for precise surface treatment and etching in semiconductor manufacturing. These systems enhance the quality and reliability of semiconductor fabrication processes.

  2. SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER

    Silicon Etchers

    SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER

    Silicon Etcher - Year 2003

    Make: Surface Tech Sys

    Model: MXP Multiplex ICP ASE HR

    1 unit @ Best Price

    Scotia, NY US

    Item 102178

  3. APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM.

    Barrel/Box Plasma Etchers

    APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM.

    Plasma Treatment System Desmear/Etchback Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson. Both companies merged and are an entity of Nordson - now called Nordson MARCH.

  4. LAM RESEARCH SIX INCH NITRIDE ETCHER

    Poly/Nitride Etchers

    LAM RESEARCH SIX INCH NITRIDE ETCHER

    Six Inch Nitride Etcher Automated Cassette to Cassette single wafer etching.

  5. PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6"

    Metal Etchers

    PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6"

    Reactive Ion Etch System

    BatchTop VII

  8. MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT

    Barrel/Box Plasma Etchers

    MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT

    Barrel Plasma Etcher with Vacuum PumpMarch Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH.

  9. High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340)

    Other Plasma Processing Equipment and Tools

    High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340)

    • Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
    • Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
    • If you need to connect to other waveguide types like WR284, adaptors may be available. 
    • Both round flange and rectangular flange loads are available as of 9/1/25.
    • An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  
    • Please contact Cline Innovations to discuss your needs.
  11. MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz

    Barrel/Box Plasma Etchers

    MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz

    Box Plasma Etcher

    Applications"Gas plasma treatment provides a fast, efficient method forsurface treatment and cleaning prior to wire bonding, dieattach, encapsulation, conformal coating and other processes.Plasma processing enhances lamination bondstrength, improves wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

  12. PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM

    Other Etchers

    PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM

    Shuttle Load Lock System

Common Applications

surface treatment

cleaning prior to bonding

die attach preparation

encapsulation preparation

conformal coating preparation

Buying Guide

Plasma Etching Systems Buying Guide

When sourcing plasma etching systems, it's essential to focus on the specifics that meet your manufacturing needs. Consider the various types available, such as barrel and box plasma etchers, that suit your particular applications.

Evaluating surplus options requires careful attention to the equipment's condition and included accessories. Here are key factors to consider:

  • Verify the operational wattage and compatibility with your substrates.
  • Check for comprehensive documentation and user manuals for setup and maintenance.
  • Assess the condition of vacuum pumps and other critical components.
  • Ensure systems are calibrated and include necessary interfacing for seamless integration into existing setups.

Frequently Asked Questions

What is a barrel plasma etcher?
A barrel plasma etcher is used for treating surfaces uniformly by placing substrates in a cylindrical chamber where plasma provides an even etching process.
How does a plasma treatment system differ from etching?
Plasma treatment systems modify surface properties such as adhesion and cleanliness without removing material, unlike etching which removes layers of material.
What are common applications of box plasma etchers?
Box plasma etchers are typically used for cleaning and etching flat substrates in semiconductor manufacturing.
Why choose surplus plasma etching systems?
Surplus plasma etching systems offer cost-effective solutions while maintaining functionality and performance for semiconductor manufacturing applications.
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