Cluster Sputtering Tool

Applied Materials Ground Ring 300mm SIP UHV Cleaned 0040-76737

ORING ID .145 CSD .070 SILICONE 60 DURO

0140-76222 Wiring Harness Assy Interconnect Chamber W/B

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks

Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process; Process Chambers: A,B,C; Orienter chamber F

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks, Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process

Process Chambers: A,B,C

Orienter chamber F

System: 1x Mainframe

3x process chamber

1x Controller Rack

1x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

1x Controller Rack

x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

AMAT Vita/Delphin Controller

Tool will be sold without Software

APPLIED MATERIALS Centura TPCC EPN 

• Serial Number 21693; Manufactured in 2011
• Electro Polished Nickel Frame & Modules
• 2ea ENP Centura Loadlocks for 200mm Wafers
• Wafer Transfer Chamber with HP Robot
  • High Temperature Quartz End Effector
  • On the Fly Wafer Centering
  • 2ea TanOx Chambers - Positions C & D
  • 2ea ENP Fast Cooldown Chambers
  • V452 Main Control Board
  • Gas Panel with 2ea Gas Pallets
  • Interconnect Cables
  • AC Distribution Rack – 160A
  • Through the Wall Installation Kit
  • Please Inquire for Additional Details