AMAT HDP Centura (#615)
Software: Win 10
OR 4000 WTM Controller
3x ENI Generator Racks
Chiller INR-498-011D
2x Remote Monitor
High Density Plasma Process; Process Chambers: A,B,C; Orienter chamber F
Software: Win 10
OR 4000 WTM Controller
3x ENI Generator Racks, Chiller INR-498-011D
2x Remote Monitor
High Density Plasma Process
Process Chambers: A,B,C
Orienter chamber F
System: 1x Mainframe
3x process chamber
1x Controller Rack
1x Chiller
3x ENI Generator Racks (Converted to separate water supply each Generator)
1x Controller Rack
x Chiller
3x ENI Generator Racks (Converted to separate water supply each Generator)
AMAT Vita/Delphin Controller
Tool will be sold without Software
1 unit @ Best Price
MAKE: Applied Materials
MODEL: Centura HDP
CATEGORY: Cluster PECVD Tools
SELLER: Infineon
Regensburg, Germany
SPECS
| Manufacturer | Applied Materials |
| Model | Centura HDP |
| Wafer Size Range | |
| Minimum | 200 mm |
| Number of Chambers | 3 |
| Process Capabilities | High Density Plasma Deposition |
| Software Revision Level | WIN 10 |
| Process Gases | SiH4, NF3, He, Argon, O2 |
| Power Requirements | 208 V 100.0 A 50/60 Hz 3 Phase |
| CE Marked | YES |
| Year of Manufacture | 2000 |
| Refurbished | YES |
| Condition | Good |