Thin Film Measurement Tools

Thin film measurement tools are essential for analyzing the thickness and properties of thin films on semiconductor wafers. These tools enhance precision and reliability in industrial metrology.

  1. KLA-Tencor ASET-F5x Thin Film Measurement System

    Other Film Thickness Testers

    KLA-Tencor ASET-F5x Thin Film Measurement System

    KLA-TENCOR ASET-F5x Thin Film Measurement System

    • Serial Number 0202802R
    • Manufactured in June, 2002
    • Inspection Modes Include:
      • Dual Beam Spectrometry
      • Spectroscopic Ellipsometry
      • Film Stress Analysis
      • SUMMIT™ Application Software Version 3.21.16
      • FTML Version 3.46.06
      • Model 300DFF1P Wafer Loading Platform
        • Dual Loadports for 300mm Wafers
        • Three Axis Wafer Handling Robot
        • GEM / SECS Communication
        • Inquire for Additional Details
  2. KLA-TENCOR Aleris 8350 Film Metrology Tool

    Other Film Thickness Testers

    KLA-TENCOR Aleris 8350 Film Metrology Tool

    KLA-TENCOR Aleris 8350 Advanced Film Metrology Tool

    • Dual 300 mm Loadports
    • Analysis of 190nm-800nm Wavelengths
    • White Light Reflectometer
    • Broadband Spectroscopic Ellipsometer
    • Single Wave Ellipsometer
    • Stress Measurement
    • iDesorber 
  3. KLA-Tencor UV-1050 Thin Film Measurement Tool

    Other Film Thickness Testers

    KLA-Tencor UV-1050 Thin Film Measurement Tool

    KLA-Tencor UV-1050 Thin Film Measurement Tool

    • Cassette to Cassette Wafer Handling
    • Wafer sizes: 100mm, 150mm & 200mm
    • Broadband UV Optics
    • Dual Beam Spectrophotometry
    • Applications: Polysilicon, UV Reflectivity & Simultaneous Oxide and TiN Thickness for CMP
    • System Control PC with Windows NT OS
    • Summit Application Software
    • GEM / SECS Communication
    • System Installation at Destination Available

Common Applications

Thickness Measurement

Film Stress Analysis

Spectroscopic Analysis

Wafer Inspection

Buying Guide

Thin Film Measurement Tools Buying Guide

When selecting thin film measurement tools, it's essential to consider a few critical factors to ensure they meet your specific needs.

Focus on compatibility with your existing semiconductor processes and the accuracy requirements specific to your applications.

  • Verify the tool's compatibility with your wafer sizes, such as 100mm to 300mm.
  • Check for the availability of dual measurement capabilities like spectroscopic ellipsometry and reflectometry.
  • Inspect the tool's condition and whether it includes necessary documentation like calibration certificates.
  • Confirm that it supports the relevant inspection modes for your specific metrology tasks.

Frequently Asked Questions

What are thin film measurement tools used for?
They are used to measure the thickness and analyze the properties of thin films in semiconductor manufacturing.
What types of thin film measurement tools are available?
Popular types include spectroscopic ellipsometers and dual beam spectrophotometers.
Why choose surplus thin film measurement tools?
Surplus tools offer cost-effective solutions for precision metrology without sacrificing quality.
Which manufacturers produce thin film measurement tools?
KLA-Tencor is a notable manufacturer of these tools.
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