Cluster Plasma Tools

Cluster plasma tools are essential for precise poly/nitride etching processes in semiconductor manufacturing. They ensure high accuracy and repeatability in various fabrication techniques.

  1. AMAT P5000 XT (Poly - Trench)

    Cluster Plasma Tools - Poly/Nitride

    AMAT P5000 XT (Poly - Trench)

    The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.

    Tool facts:

    Applied Material P5000XT

    -top mount elektronics and He backing

    -2 Chamber Narrow Gap tool

    -installed pos. Chamber A/B

    -Standard Phase 3 Robot

    -15 slot storage elevator

    -ZA Slit Valves pos. A/B

    -Wafer Positioning Sensor (WPS)

    -Cassette loadport with 2 stages

    -2 Monitor

    -System SSD

    -CF card Floppy emulator

    -MXP Unibody chamber with Narrow Gap lid

    -Turbo Seiki STP-301CVB

    -Controller Seiki SCU-350D

    -MKS Manometer

    -7 Gas Sticks / Brooks GF 100 MFCs

    -Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

    -2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

    -2x ENI OEM 12B RF generators

    -AC Box at RF Rack

Popular Manufacturers

Applied Materials

Common Applications

semiconductor device fabrication

thin film etching

microelectronics manufacturing

integrated circuit production

MEMS processing

surface treatment

Buying Guide

Cluster Plasma Tools Buying Guide

When acquiring surplus cluster plasma tools, it's crucial to ensure their compatibility with your specific etching needs and processes.

Consider factors like tool condition and available documentation to aid in seamless integration.

  • Verify tool configuration and ensure it matches your operational requirements.
  • Check for any available maintenance logs to understand past usage.
  • Ensure that all necessary accessories and components are included.
  • Confirm the tool's compatibility with existing systems and processes.

Frequently Asked Questions

What are cluster plasma tools used for?
They are used for high-precision etching processes in semiconductor manufacturing, specifically for materials like poly and nitride.
How do cluster plasma tools benefit semiconductor manufacturing?
They provide precise material removal, supporting complex semiconductor device fabrication with high accuracy.
What should I consider when buying surplus cluster plasma tools?
Check the tool's condition, compatibility with your processes, and whether it includes documentation or manuals.
Can these tools be integrated with other semiconductor equipment?
Yes, cluster plasma tools are often designed to integrate seamlessly with other tools in semiconductor fabrication lines.