AMAT P5000 XT (Poly - Trench)
The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.
Tool facts:
Applied Material P5000XT
-top mount elektronics and He backing
-2 Chamber Narrow Gap tool
-installed pos. Chamber A/B
-Standard Phase 3 Robot
-15 slot storage elevator
-ZA Slit Valves pos. A/B
-Wafer Positioning Sensor (WPS)
-Cassette loadport with 2 stages
-2 Monitor
-System SSD
-CF card Floppy emulator
-MXP Unibody chamber with Narrow Gap lid
-Turbo Seiki STP-301CVB
-Controller Seiki SCU-350D
-MKS Manometer
-7 Gas Sticks / Brooks GF 100 MFCs
-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4
-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)
-2x ENI OEM 12B RF generators
-AC Box at RF Rack
1 unit @ Best Price
MAKE: Applied Materials
MODEL: P5000 XT
CATEGORY: Cluster Plasma Tools - Poly/Nitride
SELLER: Infineon
Regensburg, Germany
SPECS
| Manufacturer | Applied Materials |
| Model | P5000 XT |
| Wafer Size Range | |
| Minimum | 200 mm |
| Set Size | 200 mm |
| Number of Chambers | 2 |
| Process Capabilities | 2x MXP Narrow Gap Pos. A/B |
| Process Gases | Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4 |
| Accessories | see description |
| Other Information | see description |
| Power Requirements | 208 V 50.0 A 50/60 Hz 3 Phase |
| Year of Manufacture | 1999 |
| Refurbished | YES |
| Condition | Very Good |
| Weight | 2,205 lb (1,000 kg) |