SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;

3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:

Maintank; Chemistry Controller-Dos Wafer Size Range

Minimum: 150 mm

Maximum:150 mm

Set Size: 150 mm

Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;

• No Spare Parts available
• dismantling date: We can dismantle the tool in May 2026 
• Expected date of availability for the buyer: July 2026

SP304 Mainunit: The system is equipped with 8-inch Bernoulli handling, Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck; Cold DI in Nozzle; Hot DI in Dispenser; exhaust up; heat exchangers: 1x double hex with Lauda for Di, 1x double hex with Lauda for Medium 2; 1x single hex with Lauda for Medium 1 (not used), 1x single hex with Lauda for Medium 3;

Chemistry: 2 cabinets with Maintank and Buffertank and with Mixtank with 3 Paddle wheels to fill and with Pressure regulator for the facility lines; with a Drainpumpstation.

Problems: Chemistry cabinets are used; some parts in the tool are corroded; the tool has been repaired and converted to Bernoulli handling by PTW; software adjustments have been made.

Wafer Size Range:

Minimum: 200mm

Maximun: 200mm

Set Size: 200mm

• No Spare Parts available
• dismantling date: We can dismantle the tool in June 2026 
• Expected date of availability for the buyer: August 2026