AET TECHNOLOGIES Rapid Annealing Furnace

• 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
• EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
• EUROTHERM 7300A Three Phase Power Controller
• LEYBOLD TTR 91 S Thermovac Vacuum Sensor
• LEYBOLD Display One Single Channel Vacuum Gauge Display
• VAT 24428-KA31 Pneumatic HV Right Angle Valve
• TELSTAR RD-9 Vacuum Pump
• HORIBA SEC-E40 Mass Flow Meter
• HORIBA ROD-1 MB Modular Readout
• Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
• Heating power: 50kW
• Input Power: 380-400VAC; 3Ph; 50Hz 125A