Single Chamber RTP Tools

Single chamber RTP tools are used for rapid thermal processing in semiconductor manufacturing. They ensure controlled temperature treatments, enhancing chip quality and performance.

  1. AET TECHNOLOGIES Rapid Annealing Furnace

    Single Chamber RTP Tools

    AET TECHNOLOGIES Rapid Annealing Furnace

    AET TECHNOLOGIES Rapid Annealing Furnace

    • 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
    • EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
    • EUROTHERM 7300A Three Phase Power Controller
    • LEYBOLD TTR 91 S Thermovac Vacuum Sensor
    • LEYBOLD Display One Single Channel Vacuum Gauge Display
    • VAT 24428-KA31 Pneumatic HV Right Angle Valve
    • TELSTAR RD-9 Vacuum Pump
    • HORIBA SEC-E40 Mass Flow Meter
    • HORIBA ROD-1 MB Modular Readout
    • Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
    • Heating power: 50kW
    • Input Power: 380-400VAC; 3Ph; 50Hz 125A

    Make: AET Technologies

    Model: Rapid Annealing Furnace

    1 unit @ Best Price

    Plano, TX US

    Item 217150

Common Applications

semiconductor manufacturing

thermal processing

annealing

temperature profiling

thin film processing

Buying Guide

Single Chamber RTP Tools Buying Guide

When purchasing surplus single chamber RTP tools, there are specific factors to consider to ensure optimal performance and compatibility with your manufacturing setup.

Assess the equipment's compatibility with your existing systems and check the specifications required for your processing needs.

  • Verify the quartz chamber's integrity and check for any signs of wear or damage.
  • Inspect the functionality of the temperature controllers and ensure they are calibrated correctly.
  • Review the maintenance history to understand the care and repairs the equipment has undergone.
  • Ensure that all necessary accessories and manuals are included to facilitate installation and operation.

Frequently Asked Questions

What are single chamber RTP tools used for?
Single chamber RTP tools are used for rapid thermal processing in semiconductor manufacturing, where quick temperature changes are required for processes such as annealing.
What is the benefit of a quartz annealing chamber?
Quartz annealing chambers offer high thermal stability and chemical inertness, making them ideal for processes that require precise temperature control.
Why consider surplus RTP tools?
Surplus RTP tools can provide cost-effective solutions while maintaining the necessary precision and quality for semiconductor manufacturing.
What should be checked before purchasing surplus RTP tools?
Ensure the equipment's condition, verify the operational status of components like the temperature controllers and lamps, and review maintenance logs.