Automated Coating and Developing Cluster System
SUSS MICROTEC FALCON ACS 200
Fully Automated High Throughput Coating, Developing Cluster System System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.
Automated coating and developing systems are essential for applying anti-reflective coatings and photolithography resists in semiconductor manufacturing. These systems enhance throughput and precision in photoresist processing, ensuring high-quality wafer fabrication.
Automated Coating and Developing Cluster System
Fully Automated High Throughput Coating, Developing Cluster System System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.
Automated Coating and Developing Cluster System
no missing parts
T/H controller 1 to 3 need service/repair
last time in production 10.1.2024
ACT8 DB System, 2 BCT, 2 COT, 3 DEV, 3 CHP, 1WEE, 10LHP, 2 ADH, 4 HHP, CWD,
Automated Coating and Developing Cluster System
no missing parts, no damages - well maintained
last time in Production 14.5.2024
ACT8 DB System, 2BCT, 2 COT, 4 DEV, 5PHP, 9 LHP, 4HHP, 2 ADH, 1WEE
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