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 AET TECHNOLOGIES Rapid Annealing FurnaceAET TECHNOLOGIES Rapid Annealing Furnace 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR LampsEUROTHERM 2704 Advanced Multi-Loop Temperature ControllerEUROTHERM 7300A Three Phase Power ControllerLEYBOLD TTR 91 S Thermovac Vacuum SensorLEYBOLD Display One Single Channel Vacuum Gauge DisplayVAT 24428-KA31 Pneumatic HV Right Angle ValveTELSTAR RD-9 Vacuum PumpHORIBA SEC-E40 Mass Flow MeterHORIBA ROD-1 MB Modular ReadoutType K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User SenseHeating power: 50kWInput Power: 380-400VAC; 3Ph; 50Hz 125A
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