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Single Chamber RTP Tools


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Item IDPhotoItem DescriptionDescriptionCass to Cass#PriceNotes Location
MakeModel
$
3502 AG Associates 2101Rapid Thermal Processing System for 3"-5" Wafers 1 F* Plano, TX
3322 AG Associates 2106Rapid Thermal Processing System for 3"-6" WafersYES 1 F* Plano, TX
111094 AG Associates 210MRapid Thermal Processing System 1 F* Plano, TX
42890 AG Associates 2146Single Chamber RTP ToolYES 1 F* Scotia, NY
51726 AG Associates 410 Controller Only410 Controller Only 1 F* Plano, TX
49891 AG Associates Heatpulse 2146Single Chamber RTPYES 1 F* Plano, TX
201134 Applied Materials Vantage VulcanSingle Chamber RTP 1 Dresden, Saxony
203102 Applied Materials Vantage Vulcan300mm RTP 1 Singapore
202506 ASM P8300 PolygonFrame Only, No chambers 1 Dresden, Saxony
199766 Mattson Technology HeliosSingle Chamber RTP 1 Taichung, Taichung City
204286 Mattson Technology Helios300mm RTP 1 Singapore
201492 Mattson Technology Helios300mm RPT 1 Singapore
201493 Mattson Technology Helios300mm RTP 1 Singapore
201494 Mattson Technology Helios300mm RTP 1 Singapore
201496 Mattson Technology Helios300mm RTP 1 Singapore
157047 Modular Process Tech RTP-600xpRapid Thermal Processing System 1 Plano, TX

NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Single Chamber RTP Tools:
AG Associates, Applied Materials, Inc., ASM, Mattson Technology, Modular Process Technology