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Single Chamber RTP Tools

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Item IDPhotoItem DescriptionDescriptionCass to Cass#PriceNotes Location
3502 AG Associates 2101Rapid Thermal Processing System for 3"-5" Wafers 1 F* Plano, TX
3322 AG Associates 2106Rapid Thermal Processing System for 3"-6" WafersYES 1 F* Plano, TX
111094 AG Associates 210MRapid Thermal Processing System 1 F* Plano, TX
42890 AG Associates 2146Single Chamber RTP ToolYES 1 F* Scotia, NY
51726 AG Associates 410 Controller Only410 Controller Only 1 F* Plano, TX
49891 AG Associates Heatpulse 2146Single Chamber RTPYES 1 F* Plano, TX
204175 Applied Materials Centura RTPTwo Chamber RTP 1 Singapore
201133 Applied Materials VantageSingle Chamber RTP 1 Dresden, Saxony
201134 Applied Materials Vantage VulcanSingle Chamber RTP 1 Dresden, Saxony
203102 Applied Materials Vantage Vulcan300mm RTP 1 Singapore
201153 Applied Materials In Centura RTP XEMod1 Platform, 2 chamber, RTP 1 Singapore
202506 ASM P8300 PolygonFrame Only, No chambers 1 Dresden, Saxony
203086 Levitech Levitor 4300RTP - Silicide 1 Malta, New York
195492 Levitech Levitor RTPRapid Thermal Processor 1 Malta, New York
199766 Mattson Technology HeliosSingle Chamber RTP 1 Taichung, Taichung City
201496 Mattson Technology Helios300mm RTP 1 Singapore
204286 Mattson Technology Helios300mm RTP 1 N* Singapore
200690 Mattson Technology MILLIOS mS Anneal 1 Malta, New York
202887 Mattson Technology SHS2800SF200mm RTP 1 Singapore
202888 Mattson Technology SHS2800SF200mm RTP 1 Singapore
157047 Modular Process Tech RTP-600xpRapid Thermal Processing System 1 Plano, TX

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Items from the following manufacturers are offered under Single Chamber RTP Tools:
AG Associates, Applied Materials Inc., Applied Materials, Inc., ASM, Levitech, Mattson Technology, Modular Process Technology