TEL ACT8-D -Track
ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3
Other lithography equipment includes essential tools used in the semiconductor manufacturing process for patterning and aligning wafers. These tools support precision and efficiency in producing highly reliable semiconductor devices.
ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3
AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet
Last Time in production: 5/5/25
Contact: Agthen Robert (FE DRS P M2 MNT LIT)
Equipment according the age in good in good shape,
however only one wafer stage is currently working
2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"
Equipment inspection virtual or physical possible
two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE
last time in production: 07.08.2024
'- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed
- Hg-lamp will be rmoved prior shipping- Coolant will be removed prior shipping- all batteries will be removed prior shipping
Log in with your username/email address