Weldment, Cathode Center Support

O-RING

Spring Compression .24

Ring, Spacer, Alum.

Shield, Plenum, SS

SHIELD ETCH ASSEMBLY 150MM

Materials Research Corp D121510 SS Shield, Gate Valve Spacer SS Shield, Gate Valve Spacer

Ultragrade 8" Eclipse Target Ti/Ta

Spring Compression SST

O-RING

Shield Gate VLV S1,S2, Plasm