Chamber Components

Chamber components are essential parts used in semiconductor manufacturing equipment to maintain controlled environments. They ensure optimal performance and reliability in manufacturing processes.

  3. Large Volume UHV Vacuum Chamber with Sturdy Frame

    Other Chamber Components

    Large Volume UHV Vacuum Chamber with Sturdy Frame

    • Stainless steel, metal-sealed chamber engineered for ultra high vacuum applications.
    • Previously used for ECR (electron cyclotron resonance) microwave plasma research.
    • Large chamber ends are removable (via rigging hooks) to ease maintenance and enable significant changes in configuration. 

      SCALE REFERENCE: Open flange on left side of chamber in Image 2 is an 8" ConFlat. Please see images & other details in PDF posted under "Extended Description". 

  6. Astex HPMS or HPMM Chamber

    Other Chamber Components

    Astex HPMS or HPMM Chamber

    • Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
    • Also available at Cline Innovations:
      • Associated microwave delivery hardware and power subsystems.
      • Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.

Popular Manufacturers

Applied Materials Toshiba Ceramics Co. Astex (Seki Diamond UHV Instruments Applied Materials In

Common Applications

Semiconductor Manufacturing

300mm SIP Chambers

UHV Environments

Aluminum PVD Processes

Buying Guide

Chamber Components Buying Guide

When purchasing surplus chamber components, it's crucial to ensure their compatibility and condition.

Consider the specific needs of your manufacturing process and the configuration of your existing equipment.

  • Verify the component's compatibility with 300mm SIP chambers.
  • Check for ultra-high vacuum (UHV) cleanliness to avoid contamination.
  • Ensure the component matches your equipment's model specifics and requirements.
  • Review any available maintenance logs or service history for insights into the component's lifecycle.

Frequently Asked Questions

What are chamber components used for?
They are used to maintain controlled environments in semiconductor manufacturing.
Can I find surplus chamber components?
Yes, surplus chamber components are available for cost-effective acquisitions.
What brands are available for chamber components?
Applied Materials is a prevalent brand for these components.
What popular types of chamber components are available?
Popular types include brackets, shutter disks, cover rings, and shields.