Radio Frequency Generators

Radio Frequency Generators are essential for providing precise power input to semiconductor processing tools. They support consistent and efficient wafer fabrication outcomes.

  4. ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ

    Radio Frequency (RF) Generators

    ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ

    Radio Frequency Generator

    The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

  7. MKS Alter SM 445 Switch Mode Microwave Power Supply

    Radio Frequency (RF) Generators

    MKS Alter SM 445 Switch Mode Microwave Power Supply

    • Air-cooled, rack-mounted microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
    • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
    • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.
  12. Sairem G3-Series GMP60KSM 6kW Microwave Generator

    Radio Frequency (RF) Generators

    Sairem G3-Series GMP60KSM 6kW Microwave Generator

    • >93% energy efficient switching power supply intended to condition power for a Sairem remote magnetron head.
    • This was the most compact 6kW microwave power supply at the time of production: 19-inch rack, 3U height.
    • This versatile power supply design includes both front panel (Local) as well as computer (Remote) control options making it a good choice for research as well as industrial applications.
    • Digital front panel includes Blue LCD display and Local control interface.
    • Standard analogue and RS232 Remote control (protocol SAIREM).
    • Detailed photos can be provided upon request.

Popular Manufacturers

Advanced Energy Astex ENI Power Systems MKS instruments National Electronics Seren Sairem MKS Instruments, Inc Daihen Japan Radio Co.

Common Applications

Semiconductor processing

Wafer etching

Plasma processes

Thin film deposition

Buying Guide

RF Generator Buying Guide

When selecting a surplus RF Generator, careful consideration of the equipment's specifications is crucial to meet your semiconductor processing needs.

Ensure compatibility with existing systems by examining the RF Generator's specifications, including power output and frequency range.

  • Inspect the unit's condition and operational history for reliability assurance.
  • Check if the generator includes necessary accessories and manuals.
  • Ensure the frequency range matches your application's requirements.
  • Verify calibration status to maintain precision in your processes.

Frequently Asked Questions

What is the function of an RF Generator?
RF Generators supply power at specific frequencies to assist in semiconductor process applications like plasma generation.
Why are RF Generators used in semiconductor production?
They offer precise power control needed for processes such as etching and deposition, enabling consistent product quality.
What should be checked when buying a surplus RF Generator?
Verify the frequency range, power output, and operational condition to ensure compatibility with your systems.
How do RF Generators differ from standard power supplies?
RF Generators deliver power at specific radio frequencies, which is crucial for applications involving plasma processes in semiconductor manufacturing.