Radio Frequency Generators

Radio Frequency Generators are essential for providing precise power input to semiconductor processing tools. They support consistent and efficient wafer fabrication outcomes.

  1. National Electronics YJ1600 6kW magnetron tube

    Radio Frequency (RF) Generators

    National Electronics YJ1600 6kW magnetron tube

    • Cline Innovations has inventory of YJ1600 magnetron tubes. 
    • Both NEW and USED tubes may be available.  Tube ages and conditions vary. 
    • Most tubes are the conventional YJ1600 design, but some tubes may be available in special water cooling or high-voltage flying-lead configurations.
    • A Limited Warranty may apply depending on factors including customer's intended application & microwave delivery configuration.
    • In general, Cline Innovations coordinates testing of tubes prior to sale unless negotiated otherwise. 
    • Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage. 
    • Cline Innovations double-boxes tubes when shipped to customers.

    Make: National Electronics

    Model: YJ 1600, YJ-1600 NL

    1 unit @ Best Price

  2. ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ

    Radio Frequency (RF) Generators

    ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ

    Radio Frequency Generator The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

  3. Astex AX2050 Microwave Generator Set

    Radio Frequency (RF) Generators

    Astex AX2050 Microwave Generator Set

    • Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
      • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
      • Water-cooled 2.5kW magnetron head with variable output.
      • Water-cooled 3-way circulator with integrated directional coupler.
      • All interconnecting cables for the above components.
      • Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
      • This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
      • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
      • A limited warranty can be considered depending on the application.
      • Photos available upon request.

Common Applications

Semiconductor processing

Wafer etching

Plasma processes

Thin film deposition

Buying Guide

RF Generator Buying Guide

When selecting a surplus RF Generator, careful consideration of the equipment's specifications is crucial to meet your semiconductor processing needs.

Ensure compatibility with existing systems by examining the RF Generator's specifications, including power output and frequency range.

  • Inspect the unit's condition and operational history for reliability assurance.
  • Check if the generator includes necessary accessories and manuals.
  • Ensure the frequency range matches your application's requirements.
  • Verify calibration status to maintain precision in your processes.

Frequently Asked Questions

What is the function of an RF Generator?
RF Generators supply power at specific frequencies to assist in semiconductor process applications like plasma generation.
Why are RF Generators used in semiconductor production?
They offer precise power control needed for processes such as etching and deposition, enabling consistent product quality.
What should be checked when buying a surplus RF Generator?
Verify the frequency range, power output, and operational condition to ensure compatibility with your systems.
How do RF Generators differ from standard power supplies?
RF Generators deliver power at specific radio frequencies, which is crucial for applications involving plasma processes in semiconductor manufacturing.