Cluster Plasma Tools

Cluster plasma tools are advanced systems designed for precise etching of metal substrates in semiconductor manufacturing. They enhance production efficiency and quality by providing uniform etch rates and superior process control.

  1. ULVAC DRY ETCHING SYSTEM

    Cluster Plasma Tools - Metal

    ULVAC DRY ETCHING SYSTEM

    Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field). The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications. Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.

Popular Manufacturers

Ulvac LAM Research Corp.

Common Applications

semiconductor manufacturing

research and development

metal layer etching

Buying Guide

Cluster Plasma Tools Buying Guide

When selecting cluster plasma tools, it's essential to consider the specific needs of your metal etching applications.

Ensure compatibility with existing systems and evaluate the condition of surplus tools.

  • Verify the tool's compatibility with your specific metal etching requirements.
  • Check the condition and maintenance history to ensure reliability.
  • Evaluate the system's configuration and available options for flexibility in processes.
  • Review included documentation and potential need for additional accessories or parts.

Frequently Asked Questions

What is a cluster plasma tool?
A cluster plasma tool is used in semiconductor manufacturing to etch metal layers with high precision and uniformity.
How do cluster plasma tools improve etching processes?
They offer enhanced control over etch rates and uniformity, which leads to higher quality and efficiency in manufacturing.
Can cluster plasma tools be used for different metals?
Yes, they are versatile and can be configured for various metal substrates depending on the process requirements.
Are surplus cluster plasma tools reliable?
Yes, surplus tools are often maintained in excellent condition and can provide reliable performance for manufacturing needs.