Facility Support Equipment

Facility support equipment encompasses various systems integral to maintaining a stable manufacturing environment in semiconductor production. It enhances operational reliability, ensuring precise environmental conditions and utility support.

  4. Security X-ray scanning machine

    Other Semiconductor Facilities Equipment

    Security X-ray scanning machine

    Rapiscan® Systems Hand luggage X-ray solutions for the most difficult baggage and parcel inspection.Security solutions for automated detection for higher throughput at checkpoints. Machine come with automated short conveyor. 
  5. Over Head Transport System (OHT) SRC320

    Other Semiconductor Facilities Equipment

    Over Head Transport System (OHT) SRC320

    A high quantity of SRC 320 parts.

    • SRC320 Vehicles (~50 pc.)
    • SRC320 SCPS-ZCU
    • SRC320 ICC
    • SRC320 PDU
    • SRC320 Rail parts
    • Foup Handler Stocker

      Please get in touch with the Equipment Trade Category Manager to get more information or price lists.

  8. CLEANROOM SYSTEMS ADVANCAIR ENVIRONMENTAL CONTROL UNIT

    Other Semiconductor Facilities Equipment

    CLEANROOM SYSTEMS ADVANCAIR ENVIRONMENTAL CONTROL UNIT

    Environmental Control Unit

    The AdvancAir is an air-conditioning control system that monitors and automatically conditions the air for a wide range of cleanroom applications. The ECU (environmental contol unit) provides control over the temperature and humidity within the enclosure as well as providing amine filtration.

Popular Manufacturers

Technical Mfg Corp Kinetic Systems Cleanroom Systems Lambda Physik Leybold Rapiscan Systems Ebara Sentry Air Systems Revco Millipore

Common Applications

Semiconductor Manufacturing

LCD Production

Cleanroom Maintenance

Utility Support Systems

Buying Guide

Facility Support Equipment Buying Guide

When selecting facility support equipment, it's crucial to consider the specific needs of your semiconductor manufacturing process. Different types of equipment play distinct roles in maintaining optimal production environments.

Here are some key factors to keep in mind:

  • Verify compatibility with existing facility infrastructure to ensure seamless integration.
  • Check for condition and maintenance records, essential for predicting longevity and performance.
  • Evaluate utility requirements, such as electrical and water connections, to prevent operational hurdles.
  • Inspect any included accessories or manuals for completeness, which aids in installation and operation.

Frequently Asked Questions

What are vibration isolation tables used for?
They are used to minimize vibrations in sensitive equipment like microscopes or lasers during semiconductor manufacturing.
How does a wet abatement gas scrubber work?
It treats water-soluble and reactive gases, crucial for safe semiconductor processing environments.
Why is water purification important in semiconductor facilities?
Pure water is essential to prevent contamination during wafer processing and other manufacturing steps.
What role do electric blowers play in semiconductor facilities?
They provide airflow for cooling and ventilation, essential for maintaining controlled temperatures.