Barrel and Box Plasma Etchers

Barrel and box plasma etchers are specialized systems used for surface treatment and cleaning in semiconductor manufacturing. These etchers enhance process reliability by providing efficient etching and surface preparation for subsequent manufacturing steps.

  1. APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM.

    Barrel/Box Plasma Etchers

    APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM.

    Plasma Treatment System Desmear/Etchback Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson. Both companies merged and are an entity of Nordson - now called Nordson MARCH.

  2. MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz

    Barrel/Box Plasma Etchers

    MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz

    Box Plasma Etcher

    Applications"Gas plasma treatment provides a fast, efficient method forsurface treatment and cleaning prior to wire bonding, dieattach, encapsulation, conformal coating and other processes.Plasma processing enhances lamination bondstrength, improves wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

  3. Branson/IPC Series 2000 Plasma Barrel Stripper

    Barrel/Box Plasma Etchers

    Branson/IPC Series 2000 Plasma Barrel Stripper

    BRANSON/IPC Series 2000 Plasma Barrel Photoresist

    • BRANSON/IPC S2005-11020Reactor Center with 10” (i.d.) X 20” (h) Quartz Chamber
    • S2000C Controller with 2ea Rotometer Controlled Gas Channels
    • ENI OEM-12 1000 Watt RF Generator

Common Applications

surface treatment

cleaning before wire bonding

preparation for die attach

encapsulation

conformal coating

Buying Guide

Barrel and Box Plasma Etchers Buying Guide

When selecting a plasma etcher, understanding your specific requirements is crucial to ensure compatibility with existing manufacturing processes.

Evaluate the power and frequency specifications carefully as they determine the etcher's operational suitability.

  • Verify the condition of the vacuum system to ensure it meets the operational needs of your applications.
  • Examine the included accessories such as vacuum pumps and control interfaces for completeness and compatibility.
  • Review any available maintenance logs to assess the history and longevity of the equipment.
  • Check for comprehensive documentation, including operation manuals, to facilitate smooth integration into existing processes.

Frequently Asked Questions

What is the difference between barrel and box plasma etchers?
Barrel plasma etchers typically process multiple items simultaneously and are well-suited for bulk processing, while box plasma etchers offer more precise control over single items.
What are common applications of plasma etchers in semiconductor manufacturing?
Plasma etchers are often used for surface cleaning, treatment before wire bonding, and preparation for encapsulation or conformal coating.
What factors should be considered when purchasing a surplus plasma etcher?
Consider the power capacity, frequency specifications, and compatibility with existing systems when purchasing a surplus plasma etcher.
Do plasma etchers require specific maintenance protocols?
Yes, maintaining vacuum integrity and cleaning gas lines periodically are essential for optimal etcher performance.