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• WR284 waveguide elbow with one elongated side.
• One of two flanges has threaded holes (Helicoil inserts).

• Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
• This tuner design is intended for use with 2.45GHz microwaves. Astex sold tuners of this type for use on Astex generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale based on your application details.
• The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
• Refurbished as needed to ensure mechanical and electromagnetic functionality.
• These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment.  Other sellers may not.

• Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
• System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
• Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
• This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
• 1.5kW to 5kW microwave power input.
• 3 stage options: Cooled, Heated, or Thermally Floating.
• Integration with computer controls is strongly recommended.
• Chamber designs vary by vintage, but can be confirmed at the time of quotation.
• Please note that the chamber shown in the attached image is a new chamber.  The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.

• Pre-owned dual directional coupler with integrated flange interlock.
• WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
• Both couplers are factory rated for 60dB.
• Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
• Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
• Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past. 
• Photos can be provided upon request.

• Aluminum rectangular waveguide component.
• Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
• Commonly used with higher power Astex microwave delivery systems & plasma sources.  
• Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
• The waveguide length is nominally 5.5 inches.  
• 10 through holes on each flange.
• Photos available upon request. 

• Offered as used, microwave-tested goods.
• Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
• Equipped with a reflected power coupler & associated SMA connector at Port 3.
• This component design was commonly used on 1990s-vintage Astex high power microwave generators.  It also offers potential utility for non-Astex microwave delivery systems.
• Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
• Photos available upon request.

Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.

• Water-cooled and air-cooled remote magnetron head.
• Equipped with waveguide arc detector.
• WR340 output waveguide.

• Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
• New, surplus goods may be available.

• Astex 1.5kW microwave generator with both front panel control (local) and computer control (local) options.
• Previously used for corporate R&D. 
• Rack-mounted power supply is in excellent condition and includes upgrades including larger (more reliable) high voltage cable & connnector design.
• Related goods including air-cooled magnetron head, 3-way circulator, and dummy load are still being unpacked and pending inspection.
• Cline Innovations intends to test the entire set as scheduling allows.

• Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
• This tuner design is intended for use with 2.45GHz microwaves. 
• Astex sold tuners of this design for use on Astex generators rated for outputs of up to 5kW.  Actual rating can be clarified at the time of sale in relation to your application details.
• The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
• Refurbished as needed to ensure mechanical and electromagnetic functionality.
• These dials can age or get jammed due to impact.  Cline Innovations replaces dials and components as needed during refurbishment.  Other sellers may not.

Conveyor ASYS BC0 01

Conveyor ASYS TRM02

Load Port, Bolt Interface

New, Never Used

Cut-Off Saw

Air Shower

Atmos-Tech Industries MAT A/S

Cryogenic Compressor

Jacketed Autoclave with 2.0L Teflon Insert.

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605