Plasma Resist Stripper Cassette to Cassette or Manual Operation Yield Engineering YES-CV100PZ

• Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
• Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
• If you need to connect to other waveguide types like WR284, adaptors may be available. 
• Both round flange and rectangular flange loads are available as of 9/1/25.
• An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  
• Please contact Cline Innovations to discuss your needs.

Chemical Downstream Plasma Source Applied Materials part number: 3750-0112

Three Stub Tuner

• 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
• WR340 rectangular waveguide connections.
• Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
• Circulator and Dummy Load sections are still factory-sealed together. 

• Used microwave goods.  At least one microwave-tested unit on hand as of 11/10/2025.
• WR340 2.45GHz microwave waveguide component designed for use with Astex A-5000 and AX2040 2.45GHz 5kW microwave delivery subsystems.
• Water-cooled with 3/8" Swagelok connections.
• Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
• Photos available upon request.

• This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
• This SmartMatch unit progressed to a "Ready" status during initial tests.
• Detailed photos can be provided upon request.

• Aluminum rectangular waveguide component.
• Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
• Commonly used with higher power Astex microwave delivery systems & plasma sources.  
• Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
• The waveguide length is nominally 5.5 inches.  
• 10 through holes on each flange.
• Photos available upon request. 

• 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
• Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
• Coordination of this repair may be possible in conjunction with the sale. 

• Pre-owned dual directional coupler with integrated flange interlock.
• WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
• Both couplers are factory rated for 60dB.
• Mechanical flange interlock can be removed if not needed.
• Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
• This directional coupler proved to be functional during past use on Cline Innovations' test bench.

• Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
• WR340 rectangular waveguide connections.
• All necessary 6mm metric fasteners.
• Dummy load includes a microwave coupler with an N-type power measurement connection.
• This isolator is used, but Dummy Load and Circulator sections are still factory-sealed with gray-paint applied to 6mm hex bolts.
• Additional photos are available upon request.

• The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
• The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
• Physical aesthetic condition is excellent.