|
Item ID |
Photo |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
Location |
Make |
Model |
|
|
$ |
|
|
165710
|
Astex
|
Astex |
Model LS or Equivalent/Substitute |
in Plasma Processing Equipment
Astex Water-Cooled Dummy Load for use with 1.5kW systems:- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
- Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
- New, surplus goods may be available.
|
1
|
|
|
|
Sterling, Massachusetts |
|
|
165747
|
Astex
|
Astex |
AX3032 |
in Plasma Processing Equipment
Astex AX3032 Water-Cooled Circulator (or equivalent):- Water-cooled, 3-way circulator with integrated directional coupler, signal processing board.
- DSubminiature 9-pin connection (for reflected power signal).
- WR284 waveguide component intended for use with Astex 2.5kW microwave generators including AX2050.
|
1
|
|
|
|
Sterling, Massachusetts |
|
|
165749
|
Astex
|
Astex |
AX3153 |
in Plasma Processing Equipment
Astex AX3153 or equivalent Dummy Load:- WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
|
1
|
|
|
|
Sterling, Massachusetts |
|
|
165750
|
Astex
|
Astex |
CS2 |
in Plasma Processing Equipment
Astex CS2 Circulator with Directional Coupler:- Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
- Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
|
1
|
|
|
|
Sterling, MA |
|
|
63666
|
Astex
|
Astex |
AX 7610 |
in Plasma Processing Equipment
ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE:Chemical Downstream Plasma Source
Applied Materials part number: 3750-0112
|
2
|
|
|
|
Scotia, New York |
|
|
184611
|
Astex
|
Astex |
Astex WR340 Dummy Load |
in Plasma Processing Equipment
Astex WR340 Water-Cooled Dummy Load:- Offered as used, microwave-tested goods.
- WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
- Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
- Photos available upon request.
|
2
|
|
|
|
Leominster, Massachusetts |
|
|
184653
|
Astex
|
Astex |
FI20170 (0760-01028) AMAT Ulvac |
in Plasma Processing Equipment
Astex FI20170 Water-Cooled Circulator (or Equivalent):- This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.
- The integrated coupler measures reflected power using a diode senor. The reflected power signal is processed using an integral circuit-board designed into the coupler. Output is provided using a 9-pin male D-subminature connector.
- These goods may also be compatible with Astex subsystems for non-OEM applications.
- Goods are most typically integrated with 2.5kW microwave delivery systems.
- Photos included in this listing are for reference only. The actual circulator shown in this listing has been sold, but depicts the general design.
- Please contact Cline Innovations for more information.
|
1
|
|
|
|
Sterling, Massachusetts |
|
|
190257
|
Astex
|
Astex |
CPR340 or equivalent |
in Plasma Processing Equipment
Astex WR284 to WR340 Waveguide Adaptor:- Aluminum rectangular waveguide component.
- Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
- Commonly used with higher power Astex microwave delivery systems & plasma sources.
- Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
- Approximate length is 5 to 6 inches.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
190326
|
Astex
|
Astex |
Astex WR340 Circulator |
in Plasma Processing Equipment
Astex 3-way Circulator or Equivalent:- Offered as used, microwave-tested goods.
- Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
- Equipped with a reflected power coupler & associated SMA connector at Port 3.
- This component design was commonly used on 1990s-vintage Astex high power microwave generators. It also offers potential utility for non-Astex microwave delivery systems.
- Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
- Photos available upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
202814
|
Astex
|
Astex |
|
in Plasma Processing Equipment
ASTEX Three Stub Manual Microwave Impedance Tuner:- Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
- This tuner design is intended for use with 2.45GHz microwaves.
- Astex sold goods of this general design for use on generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale in relation to your application details.
- The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
- Refurbished as needed to ensure mechanical and electromagnetic functionality.
- These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
209065
|
Astex
|
Astex |
FI20131 Fl20131 3750-01139 |
in Plasma Processing Equipment
Astex 90-degree Waveguide Elbow:- Used goods.
- Aluminum waveguide with black orange-peel painted exterior.
- Threaded holes on both flanges (Helicoil inserts).
|
2
|
|
|
|
Leominster, Massachusetts |
|
|
248913
|
Astex
|
Astex |
AX3030 |
in Plasma Processing Equipment
Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok adaptors.
- Design intended for up to 500W continuous reflected power.
- Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
- Photos available upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
254384
|
Astex
|
Astex |
(AGL) Astex B13171 |
in Plasma Processing Equipment
Astex Model B13171 Microwave Dual Directional Coupler:- Pre-owned dual directional coupler with integrated flange interlock.
- WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
- Both couplers are factory rated for 60dB.
- Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
- Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
- Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past.
- Photos and further information can be provided upon request.
|
1
|
|
|
N* |
Leominster, Massachusetts |
|
|
85963
|
Astex
|
Astex |
AX3041 |
in Plasma Processing Equipment
ASTEX THREE STUB TUNER:Three Stub Tuner
|
1
|
|
1,200.32 |
|
Scotia, New York |
|
|
168802
|
Astex
|
Astex |
HS |
in PVD Power Supplies
Astex HS Air-Cooled Magnetron Head:- For use with compatible Astex switching microwave power supplies.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
168804
|
Astex
|
Astex |
HS-1000, HS1000 |
in PVD Power Supplies
Astex HS-1000 Air-Cooled Magnetron Head:- For use with compatible Astex switching microwave power supplies.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
213180
|
Astex
|
Astex |
AX2518 |
in PVD Power Supplies
ASTeX AX2518 SmartPower Microwave Power Supply:- Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
- Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods. Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
- Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
- Goods can be sold with a limited warranty.
|
2
|
|
|
|
Leominster, Massachusetts |
|
|
225956
|
Astex
|
Astex |
2.5kW |
in PVD Power Supplies
Astex 2.5kW switching microwave generator set:- The complete tested, refurbished 2.5kw microwave generator set includes:
- 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
- Water-cooled 2.5kW magnetron head with variable output.
- Water-cooled 3-way circulator.
- All interconnecting cables for the above components.
- Operational and ready to ship with relatively short lead-time.
- Limited warranty can be considered depending on the application.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
206579
|
Astex
|
Astex |
SXRHA |
in PVD Power Supplies
ASTEX MAGNETRON HEAD:Magnetron Head
|
2
|
|
|
|
Scotia, New York |
|
|
184607
|
Astex
|
Astex |
AX5000, AX6000, AX6350 or similar |
in Production Tools
Astex AX5000 Microwave Plasma Diamond Growth System:- Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
- System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
- Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
- This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
- 1.5kW to 5kW microwave power input.
- 3 stage options: Cooled, Heated, or Thermally Floating.
- Integration with computer controls is strongly recommended.
- Chamber designs vary by vintage, but can be confirmed at the time of quotation.
- Please note that the chamber shown in the attached image is a new chamber. The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
|
1
|
|
|
F* |
Leominster, Massachusetts |
|
|
137483
|
Astex
|
Astex |
ECR-MOCVD-PECVD |
in Production Tools
ASTeX Large Volume Plasma Processing System (ECR-PECVD-MPCVD-MOCVD):High density plasma system activated by ECR-enhanced, 2.45GHz microwave input offers PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures. Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.
Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching. This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
189843
|
Astex
|
Astex |
AX6500 "Clamshell" MPCVD |
in Production Tools
Astex AX6500 Bottom-launch Diamond Growth System:- This in-stock equipment is offered for domestic sale within the USA only.
- Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
- Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
- System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
- Chamber cleaning,
- Computer control updates,
- Higher throughput water cooling subsystem,
- Replacement of selected o-ring components with metal seals, and
- Enhanced process control/monitoring devices.
- The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
- Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
- Photo Note: System photo shown include a similar quality, similar vintage system sold in the past. Actual photos or inspection available to qualified customers only.
|
1
|
|
|
|
Leominster, Massachusetts |
|