 |
Item ID |
Photo |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
Location |
Make |
Model |
|
|
$ |
|
 |
260163
|
Astex (Seki Diamond
|
Astex (Seki Diamond |
HPMM or HPMS CVD |
in Chamber Components
Astex HPMS or HPMM Chamber:- Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
- Also available at Cline Innovations:
- Associated microwave delivery hardware and power subsystems.
- Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
209066
|
Astex
|
Astex |
AX3008 |
in Plasma Processing Equipment
Astex 90-degree Waveguide Elbow with extension:- WR284 waveguide elbow with one elongated side.
- One of two flanges has threaded holes (Helicoil inserts).
|
2
|
|
|
 |
Leominster, Massachusetts |
|
 |
260363
|
Astex
|
Astex |
GL212 |
in Plasma Processing Equipment
Astex GL212 WR340 Dual Directional Microwave Coupler:- Astex WR340 black-painted aluminum waveguide component with 2 integrated directional couplers.
- Each coupler is equipped with an N-type connection for power measurement. The couplers are oriented in opposite directions so that one can measure forward power and the other can measure reflected power.
- This part was last calibrated on 1-6-14 and likely needs recalibration. Cline Innovations may be in a position to coordinate recalibration at the time of sale.
- The lower right side of photo 1of3 shows that some paint scuffing has taken place on the outside of the waveguide. This is a superficial blemish and the item is in Very Good physical condition.
|
1
|
|
|
 |
Leominster, Massachusetts |
|
 |
260482
|
Astex
|
Astex |
AX3041 |
in Plasma Processing Equipment
Astex AX3041 Three Stub Tuner:- Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
- This tuner design is intended for use with 2.45GHz microwaves. Astex sold tuners of this type for use on Astex generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale based on your application details.
- The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
- Refurbished as needed to ensure mechanical and electromagnetic functionality.
- These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment. Other sellers may not.
|
1
|
|
|
 |
Leominster, Massachusetts |
|
 |
260497
|
Astex
|
Astex |
DCS |
in Plasma Processing Equipment
Astex Model DCS WR284 Single-Directional Coupler:- Older vintage Astex WR284 waveguide component with integrated microwave coupler.
- Cline Innovations notes indicate that the standard factory-set "pick-up" for this coupler type is 50dB.
- Commonly used with Astex S-1000, S-1000i, S-1500 and S-1500i microwave generators.
- The coupler has an SMA connector which is typically mounted to an Alan Industries Diode.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
261013
|
Astex
|
Astex |
CPR3 |
in Plasma Processing Equipment
Astex CPR3 WR284 Waveguide Section:- 3" long WR384 rectangular flange waveguide section.
- Aluminum component with black orange-peel finish.
|
2
|
|
|
N* |
Leominster, Massachusetts |
|
 |
261483
|
Astex
|
Astex |
FI30618 |
in Plasma Processing Equipment
Astex Directional Coupler with Integral Signal Processing:- Relatively rare Astex waveguide component which includes an AX3120-like single directional coupler with integral signal processing board.
- A 9-pin male Dsubminiature connector is used to handle the output signal in the same manner as the AX3120 circulator output.
- The signal processing board includes 2 potentiometers which can be used for calibration.
- WR284 waveguide section with 3-inch nominal length.
|
1
|
|
|
N* |
Leominster, Massachusetts |
|
 |
165710
|
Astex
|
Astex |
LS or equivalent |
in Plasma Processing Equipment
Astex Water-Cooled Dummy Load for use with 1.5kW systems:- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
- New, surplus goods may be available.
|
1
|
|
|
 |
Leominster, Massachusetts |
|
 |
165750
|
Astex
|
Astex |
CS2 |
in Plasma Processing Equipment
Astex CS2 Circulator with Directional Coupler:- Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
- Intended for use on Astex generators with up to 1.5kW output such as S-1500i and S-1000i.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
63666
|
Astex
|
Astex |
AX 7610 |
in Plasma Processing Equipment
ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE:Chemical Downstream Plasma Source
Applied Materials part number: 3750-0112
|
2
|
|
|
 |
Scotia, New York |
|
 |
184611
|
Astex
|
Astex |
LS340 |
in Plasma Processing Equipment
Astex LS340 or equivalent Water-Cooled Dummy Load:- Offered as used, microwave-tested goods.
- WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
- Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
- Photos available upon request.
|
2
|
|
|
|
Leominster, Massachusetts |
|
 |
190257
|
Astex
|
Astex |
CPR340 or equivalent |
in Plasma Processing Equipment
Astex WR284 to WR340 Waveguide Adaptor:- Aluminum rectangular waveguide component.
- Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
- Commonly used with higher power Astex microwave delivery systems & plasma sources.
- Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
- The waveguide length is nominally 5.5 inches.
- 10 through holes on each flange.
- Photos available upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
190326
|
Astex
|
Astex |
CS340 or Equivalent |
in Plasma Processing Equipment
Astex 3-way Circulator or Equivalent:- Offered as used, microwave-tested goods.
- Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
- Equipped with a reflected power coupler & associated SMA connector at Port 3.
- This component design was commonly used on 1990s-vintage Astex high power microwave generators. It also offers potential utility for non-Astex microwave delivery systems.
- Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
- Photos available upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
202814
|
Astex
|
Astex |
TS or equivalent |
in Plasma Processing Equipment
ASTEX Three Stub Manual Microwave Impedance Tuner:- Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
- This tuner design is intended for use with 2.45GHz microwaves.
- Astex sold tuners of this design for use on Astex generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale in relation to your application details.
- The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
- Refurbished as needed to ensure mechanical and electromagnetic functionality.
- These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment. Other sellers may not.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
248913
|
Astex
|
Astex |
AX3030 or equivalent |
in Plasma Processing Equipment
Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:- As of 8/19/2025, Cline Innovations inventory of the AX3030 has been depleted. Depending on your application, we may have a functional equivalent to offer.
- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok connectors.
- Design intended for up to 500W continuous reflected power.
- Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
254384
|
Astex
|
Astex |
B13171 |
in Plasma Processing Equipment
Astex Model B13171 Microwave Dual Directional Coupler:- Pre-owned dual directional coupler with integrated flange interlock.
- WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
- Both couplers are factory rated for 60dB.
- Mechanical flange interlock can be removed if not needed.
- Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
- This directional coupler proved to be functional during past use on Cline Innovations' test bench.
|
1
|
|
|
 |
Leominster, Massachusetts |
|
 |
85963
|
Astex
|
Astex |
AX3041 |
in Plasma Processing Equipment
ASTEX THREE STUB TUNER:Three Stub Tuner
|
1
|
|
1,200.32 |
 |
Scotia, New York |
|
 |
168804
|
Astex
|
Astex |
Astex HS-1000 or HS1000 |
in PVD Power Supplies
Astex HS-1000 Air-Cooled 1000W Magnetron Head:- For use with compatible Astex 1kW switching microwave power supplies.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
255065
|
Astex
|
Astex |
AX2107 |
in PVD Power Supplies
Astex AX2107 700W Microwave Generator:- Cline Innovations has a used AX2107 rack-mounted switching power supply which was previously used on a microwave plasma system in a clean-room setting.
- Goods available as a power supply only or as a complete 700W microwave generator set including cables as well as WR284 waveguide components including: remote magnetron head, circulator with integrated directional coupler, and dummy load.
- This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.
- This specific generator set came from a working system used in an R&D setting.
- Photos are also available upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
255066
|
Astex
|
Astex |
A 5000 A5000 A-5000 |
in PVD Power Supplies
Astex A5000 5kW Industrial Microwave Generator Set:- Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
- Remote water-cooled magnetron head,
- Circulator with integrated directional coupler, and
- Water-cooled dummy load.
- The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
- Testing of the goods can be expedited upon request.
- Photos are also available upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
257457
|
Astex
|
Astex |
HS 5000 HS5000 HS-5000 or equivalent |
in PVD Power Supplies
Astex HS5000 5kW magnetron head or equivalent:- Water-cooled and air-cooled remote magnetron head.
- Equipped with waveguide arc detector.
- WR340 output waveguide.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
206579
|
Astex
|
Astex |
SXRHA |
in PVD Power Supplies
ASTEX MAGNETRON HEAD:Magnetron Head
|
2
|
|
|
 |
Scotia, New York |
|
 |
261504
|
Astex
|
Astex |
D13614 |
in PVD Power Supplies
Astex AGL D13614 6kW Magnetron Head:- Uses modified YJ1600 6kW magnetron tube.
- Includes and N-type connector on the waveguide launch section.
- Goods have not been tested due to lack of a compatible power supply.
- Preliminary measurements on the magnetron tube suggest that it should be functional.
- Very good physical condition.
|
1
|
|
|
N* |
Leominster, Massachusetts |
|
 |
260672
|
Astex
|
Astex |
S-1500i S1500i |
in PVD Power Supplies
Astex S-1500i Microwave Generator:- Astex 1.5kW microwave generator with both front panel control (local) and computer control (local) options.
- Previously used for corporate R&D.
- Rack-mounted power supply is in excellent condition and includes upgrades including larger (more reliable) high voltage cable & connnector design.
- Related goods including air-cooled magnetron head, 3-way circulator, and dummy load are still being unpacked and pending inspection.
- Cline Innovations intends to test the entire set as scheduling allows.
|
1
|
|
|
 |
Leominster, Massachusetts |
|
 |
260939
|
Astex
|
Astex |
HV Cable |
in PVD Power Supplies
Astex High Voltage HV Cable for Microwave Generator:- Cline Innovations has inventory of Astex HV Cables of various types and lengths.
- Current inventory includes cables which fit AX2115, S-1500, S-1500i, A5000, and AX2040 microwave generators rated for as much as 10,000 Watts.
- Please don't hesitate to contact us if you are in need of a cable. Please consider sharing photos and length information for your existing cable (if you have one) in addition to images of the back panel of your power supply.
|
1
|
|
|
N* |
Leominster, Massachusetts |
|
 |
225956
|
Astex
|
Astex |
AX2050 |
in PVD Power Supplies
Astex AX2050 Microwave Generator Set:- Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
- 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
- Water-cooled 2.5kW magnetron head with variable output.
- Water-cooled 3-way circulator with integrated directional coupler.
- All interconnecting cables for the above components.
- Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
- This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time.
- This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.
- A limited warranty can be considered depending on the application.
- Photos available upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
260210
|
Astex
|
Astex |
AX2040 or equivalent |
in PVD Power Supplies
Astex AX2040 (or equivalent) Microwave Generator:- Cline Innovations has inventory of hardware related to the Astex AX2040 microwave generator.
- Please don't hesitate to contact Cline Innovations if you are in need of components, magnetron tubes, or are seeking a complete generator set.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
184607
|
Astex
|
Astex |
AX5000, AX6000, AX6350 or similar |
in Production Tools
Astex AX5000 Microwave Plasma Diamond Growth System:- Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
- System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
- Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
- This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
- 1.5kW to 5kW microwave power input.
- 3 stage options: Cooled, Heated, or Thermally Floating.
- Integration with computer controls is strongly recommended.
- Chamber designs vary by vintage, but can be confirmed at the time of quotation.
- Please note that the chamber shown in the attached image is a new chamber. The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
|
1
|
|
|
F* |
Leominster, Massachusetts |
|
 |
137483
|
Astex
|
Astex |
ECR-Microwave Plasma |
in Production Tools
ASTeX High Power, Low Pressure Microwave Plasma System :Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures. Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating. Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching. This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.
|
1
|
|
|
 |
Leominster, Massachusetts |
|
 |
189843
|
Astex
|
Astex |
AX6500 "Clamshell" MPCVD |
in Production Tools
Astex AX6500 Bottom-launch Diamond Growth System:- This in-stock equipment is offered for domestic sale within the USA only.
- Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
- Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
- System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
- Chamber cleaning,
- Computer control updates,
- Higher throughput water cooling subsystem,
- Replacement of selected o-ring components with metal seals, and
- Enhanced process control/monitoring devices.
- The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
- Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
- Photo Note: System photo shown include a similar quality, similar vintage system sold in the past. Actual photos or inspection available to qualified customers only.
|
1
|
|
|
 |
Leominster, Massachusetts |
|