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Battery Tester

OFENV01D
Furnace with 2 Tubes

1x Reactor Dot. Poly Low Pressure

1x Reactor Atmosphere WET-OXID

ASM Furnace Vertical - Advance 400

2 Reactors atmospheric

ASM Furnace Vertical 

2 Reactor atmospheric

Reactor 1 is missing heater cassette, Motor driver, Board and loader arm

• Pre-owned dual directional coupler with integrated flange interlock.
• WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
• Both couplers are factory rated for 60dB.
• Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
• Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
• Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past. 
• Photos and further information can be provided upon request.

• Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
  • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
  • Water-cooled 2.5kW magnetron head with variable output.
  • Water-cooled 3-way circulator with integrated directional coupler.
  • All interconnecting cables for the above components.
• Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
• This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
• This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
• A limited warranty can be considered depending on the application.
• Photos available upon request.

• Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
• Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
• Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
• Goods can be sold with a limited warranty.

• For use with compatible Astex switching microwave power supplies.

• Offered as used, microwave-tested goods.
• WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
• Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
• Photos available upon request.

• Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok adaptors.
• Design intended for up to 500W continuous reflected power. 
• Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
• Photos available upon request.

Three Stub Tuner

• Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
• System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
• Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
• This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
• 1.5kW to 5kW microwave power input.
• 3 stage options: Cooled, Heated, or Thermally Floating.
• Integration with computer controls is strongly recommended.
• Chamber designs vary by vintage, but can be confirmed at the time of quotation.
• Please note that the chamber shown in the attached image is a new chamber.  The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.

• Aluminum rectangular waveguide component.
• Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
• Commonly used with higher power Astex microwave delivery systems & plasma sources.  
• Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
• Approximate length is 5 to 6 inches.

Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.

• This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.  
• The integrated coupler measures reflected power using a diode senor.  The reflected power signal is processed using an integral circuit-board designed into the coupler.  Output is provided using a 9-pin male D-subminature connector.
• These goods may also be compatible with Astex subsystems for non-OEM applications. 
• Goods are most typically integrated with 2.5kW microwave delivery systems.
• Photos included in this listing are for reference only.  The actual circulator shown in this listing has been sold, but depicts the general design.
• Please contact Cline Innovations for more information.

• Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
• This tuner design is intended for use with 2.45GHz microwaves. 
• Astex sold goods of this general design for use on generators rated for outputs of up to 5kW.  Actual rating can be clarified at the time of sale in relation to your application details.
• The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
• Refurbished as needed to ensure mechanical and electromagnetic functionality.
• These dials can age or get jammed due to impact.  Cline Innovations replaces dials and components as needed during refurbishment.

• Water-cooled and air-cooled remote magnetron head.
• Equipped with waveguide arc detector.
• WR340 output waveguide.

Conveyor ASYS BC0 02

SMIF LOAD PORT--300MM

Wafer Loader, Elevator