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Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas
Item ID: 225919

Offered 1 Offered at $ 225,000.00

Plasma-Therm SLR 770 ICP Etcher - Remaufactured with ECT Upgrade

PLASMA-THERM SLR 770 ICP Etcher; Serial Number PTI-76536F 

  • Upgraded ICP Process Module (PM)
    • High Power/Easy Maintenance ICP Applicator
    • 10” (dia.) Lower Electrode
    • Ceramic Wafer Clamp
    • Helium Backside Cooling
    • Currently Configured for 6” Wafers
    • Other Wafer Sizes Available
  • Redesigned & Improved Load Lock Chamber with Linear Robotic Arm
    • LL Arm with Programmable Stepper Motor & Controller
    • Manual Wafer Loading for 6” & 8” Wafers
  • Gas Distribution Box with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available (Option)
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 500W Auto Matching Network
  • RFPP RF20M RF Generator: 2000W @ 2.0MHz
  • RFPP AMN-20 2KW Auto Matching Network
  • 2ea RFPP AMNPS-2A Auto Matching Network Controllers
  • SHIMADZU TMP1003 MAG LEV Turbo Pump with Controller
  • VAT 64 Rectangular Throttle Valve with VAT PM5 Controller
  • INFICON MPG500 Ion Gauge on ICP Chamber
  • MKS 325 Moducell Pirani Gauge on Load Lock
  • Watlow Three Zone Chamber Heater Controller
  • EquipmentWorks 2.4 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU @ 3.4GHz, 16GB RAM and 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via
    Modbus TCP/IP Communications Protocol
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP
    Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 22” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP80 Dry Roughing Pump on Process Module
  • Agilent DS 302 Mechanical Pump on Load Lock 
  • SMC HRR018 Rackmount Chiller; 5-45° C Temperature Range
  • Electrical Disconnect Box - 208VAC, 60Hz, 3 Ph
  • System Completely Remanufactured and Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price………$ 225,000.00 USD


Plasma-Therm SLR 770 ICP Etcher - Remaufactured with ECT Upgrade
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Location: Tampa, Florida
Unit Price $ 225,000.00
Number of Units 1
Manufacturer Plasma-Therm
Model SLR 770
Wafer Size Range 
  Minimum 75 mm
  Maximum 200 mm
  Set Size 150 mm
Process Inductively Coupled Plasma Etching
Controller Type PC Controller Type
Software Revision Level ECT
Interface Other
End Point Detection Optional
  Loadlock Yes/No YES
  Loadlock Pump Manufacturer & Model Agilent DS302
High Vacuum Pump SHIMADZU TMP1003 MAG LEV Turbo Pump
Roughing Pump EDWARDS QDP80
RF Generator Model RFPP RF5S & RF20M
Number of Gas Inputs Four Gas
Process Gases Optional
  Number of Chillers 1
  Chiller #1Manufacturer/Model SMC HRR018
Other Information 

Completely remanufactured with new application software and state of the art equipment design features

Power Requirements 208 V     60 Hz     3¬†Phase
Refurbished YES
Condition Like New

(click name below to visit its website directly)
Catalyst Equipment Corporation
Plano , Texas

Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas