Other Information | Tencor P16+ P/N: 0147190-000
Classical Long-Scan Contact Mode Long-scan profiling in contact mode is used on profiler measurement heads. Maximum scan length: 80 mm or 200 mm Lateral resolution1: X = 25 nm, Y = 1 μm
Microhead 5 SR P/N: 0142808-000
- Vertical range 327 μm
- Stylus force 1 - 50 mg
- 13 μm, resolution < 0.01 Å
- 64 μm, resolution < 0.04 Å
- 327 μm, resolution < 0.20 Å
Standards Compliance CE Compliance – EC directives – Harmonized safety standards – Harmonized Electromagnetic standards – Semi S2-0703 and S8-0705 Compliance – RoHS Compliance for computer and peripherals
OS windows XP Professional
Power Requirements:
90 - 110 V, 50 - 60 Hz 110 - 130V, 50 - 60 Hz 208 - 260V, 50 - 60 Hz |