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in Medium Current Implanters
Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California
Item ID: 178965

Offered 1 Offered at Best Price

Axcelis Optima HDxT, Ion Implanter, 300mm,

300mm ion implanter, spare beam tunnel, SRA, PFG, source, manipulator, bushing source flange adapter, source turbo exhaust line, and . chamber liners.

Axcelis Optima HDxT
Roughing Pumps:
Edwards IGX100L
Edwards iGX100M
Edwards iGX600M
Cryo Pumps:
Qty (2) Brooks: 320FE
Qty (1) Brooks: 250FE
Turbo Pump
TP1: Edwards STP-XA2703CV
TP2: Edwards STP-A1303CV
Affinity J Chiller Model: GWN-ZRMK-BE55CBS6
Affinity F-Series Model: FWA-032K-DD19CBD4
Cryo Compressors:
Qty (2) Brooks: IS-1000
Known Missing Parts
Part DescriptionQty
Robot pick on transfer arm.1
Cryo Compressor2
Docking Plate1
12V batteries for EOM circuit2
Solenoid block for the loadports3




Tool ID: IMP2150

Axcelis Optima HDxT, Ion Implanter, 300mm,
  Click to see additional image(s)... other images

Location: Malta, New York
Unit Price Unstated
Number of Units 1
Manufacturer Axcelis Technologies
Model Optima HDxT
Extended Description  Details at IMP2150.pdf

(click name below to visit its website directly)
Santa Clara , California
Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.


Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California