Item ID: 11919

**1 Offered at Best Price**

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM

Plasmatherm RIE/Plasma Etch System

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Location: Scotia, New York

Unit Price	Unstated
Number of Units	1
Manufacturer	Plasma-Therm
Model	VII 734MF
Wafer Size Range
Maximum	200 mm
Process	RIE/Plasma Etch
Controller Type	Microprocessor Controller Type
High Vacuum Pump	Alcatel Turbomolecular Pump 5402CP
Roughing Pump	None
RF Generator Model	RFPP 10S
Number of Gas Inputs	Five Gas
Process Gases	C2H4, N2O, CF4, Ar ,H2
Chillers
Number of Chillers	1
Chiller #1Manufacturer/Model	Tek-Temp MM1500
Other Information	Upper and lower electrodes: 12" x 12" w/2" radius corners Lower electrode: 80 to 350°C System power center Mass flow control (8) MKS mass flow controls, 4 @ 200 sccm and 4 @ 100 sccm Gases used: C2H4, N2O, CF4, Ar ,H2 Temperature controller: Tek-Temp Model MM1500/3000 208 V, 30 A, 60 Hz, 1 phase 27"W x 28"D x 34.5"H Refrigerant R-12 Mechanical pumps not included.
Exterior Dimensions
Width	46.000 in (116.8 cm)
Depth	48.000 in (121.9 cm)
Height	66.000 in (167.6 cm)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 11919

1 Offered at Best Price

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM

**1 Offered at Best Price**