Item ID: 11074

**1 Offered at Best Price**

NEXX SYSTEMS ECR PECVD RIE SYSTEM

Low Temperature CVD Using ECR Technology. Formerly PlasmaQuest Astex

This system is designed for the fluorination of DLC surfaces on various substrates.
The ECR zone is produced by a Nd-Fe-B permanent magnet which produces a high magnetic field launch of the microwave energy.
High magnetic field launch produces a highly stable and efficient ECR plasma.

Nexx Systems Cirrus 300

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Location: Scotia, NY

Unit Price	Unstated
Number of Units	1
Manufacturer	Nexx Systems
Model	Cirrus 300
Description	CVD Deposition with ECR source
Wafer Size Range
Minimum	50 mm
Maximum	300 mm
Controller Type	PC Controller Type
Loadlock
Loadlock Yes/No	YES
High Vacuum Pump	Balzers TMH 1001corrosive service Turbo
Automatch Text	ASTeX AX3060
Chillers
Number of Chillers	1
Chiller #1Manufacturer/Model	Neslab - HX 75
Other Information	PQ2000 Series permanent magnet low profile ECR source. ASTeX AX2110 microwave power supply with remote magnetron head. Output 150 - 1000 Watt, PC controlled 20 inch outer diameter reactor chamber with Viton seals. Six (6) MKS Instruments 2179A Kalrez sealed mass flow controllers, expandable to seven. Wafer Chuck Handling up to 300mm in diameter RF Biased, Via RFPP 1kW, 13.56 Mhz, with automatch Recirculating fluid cooling Helium backside cooling Temperature range -25C to 130C Mechanical clamp substrate holder NB: Higher temperatures can be achieved without helium backside cooling
Operating Air Pressure	80.00 PSI (551,624.00 N/sq m)
Year of Manufacture	2000
Condition	Excellent
Exterior Dimensions
Width	81.000 in (205.7 cm)
Depth	41.000 in (104.1 cm)
Height	85.000 in (215.9 cm)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 11074

1 Offered at Best Price

NEXX SYSTEMS ECR PECVD RIE SYSTEM

**1 Offered at Best Price**