ULVAC FERROELECTRIC ETCHER:Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application
The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.