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Your search for Manufacturer: Plasma-Therm
found:
  • 14 Listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
30246
Plasma-Therm  

Plasma-Therm  

VLR 700 VLR-PM1-ICRB-PM 

List all items of this typeCluster PECVD Tools

in Production Tools

PLASMATHERM VLR 700:
Single Chamber PECVD. Mixed Frequency Deposition
(MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz)
RF power delivered both electrodes.
1   F* Scotia, NY
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:
Shuttle Load Lock System
1   Scotia, NY
201152
Plasma-Therm  

Plasma-Therm  

790 RIE PECVD 11" 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.


1   Scotia, New York
225948
Plasma-Therm  

Plasma-Therm  

790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:

PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F

  • Manually Loaded Process Chamber with 8” (dia.) Cathode
  • Gas Distribution Panel with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 Auto Matching Network
  • RFPP AMNPS-2A Auto Matching Network Controller
  • Leybold TMP 361 Turbomolecular Pump
  • Leybold NT 150/360 Turbomolecular Pump Controller
  • EquipmentWorks 2.6 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
  • All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 21” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP40 Dry Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 Ph
  • System Fully Refurbished & Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price……$ 85,000.00 USD
1 85,022.78 Plano, Texas
225919
Plasma-Therm  

Plasma-Therm  

SLR 770 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

Plasma-Therm SLR 770 ICP Etcher - Remaufactured with ECT Upgrade:

PLASMA-THERM SLR 770 ICP Etcher; Serial Number PTI-76536F 

  • Upgraded ICP Process Module (PM)
    • High Power/Easy Maintenance ICP Applicator
    • 10” (dia.) Lower Electrode
    • Ceramic Wafer Clamp
    • Helium Backside Cooling
    • Currently Configured for 6” Wafers
    • Other Wafer Sizes Available
  • Redesigned & Improved Load Lock Chamber with Linear Robotic Arm
    • LL Arm with Programmable Stepper Motor & Controller
    • Manual Wafer Loading for 6” & 8” Wafers
  • Gas Distribution Box with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available (Option)
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 500W Auto Matching Network
  • RFPP RF20M RF Generator: 2000W @ 2.0MHz
  • RFPP AMN-20 2KW Auto Matching Network
  • 2ea RFPP AMNPS-2A Auto Matching Network Controllers
  • SHIMADZU TMP1003 MAG LEV Turbo Pump with Controller
  • VAT 64 Rectangular Throttle Valve with VAT PM5 Controller
  • INFICON MPG500 Ion Gauge on ICP Chamber
  • MKS 325 Moducell Pirani Gauge on Load Lock
  • Watlow Three Zone Chamber Heater Controller
  • EquipmentWorks 2.4 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU @ 3.4GHz, 16GB RAM and 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via
    Modbus TCP/IP Communications Protocol
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP
    Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 22” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP80 Dry Roughing Pump on Process Module
  • Agilent DS 302 Mechanical Pump on Load Lock 
  • SMC HRR018 Rackmount Chiller; 5-45° C Temperature Range
  • Electrical Disconnect Box - 208VAC, 60Hz, 3 Ph
  • System Completely Remanufactured and Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price………$ 225,000.00 USD

 

1 225,060.30 Tampa, Florida
206582
Plasma-Therm  

Plasma-Therm  

BT 6" RIE MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":

Reactive Ion Etch System

BatchTop VII

1   Scotia, New York
45430
Plasma-Therm  

Plasma-Therm  

790 11 RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:

Reactive Ion Etch System
11" Electrode

1   Scotia, New York
50854
Plasma-Therm  

Plasma-Therm  

VII 734 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:
Combination Plasma Deposition System/RIE
1   F* Scotia, NY
124315
Plasma-Therm  

Plasma-Therm  

790 11" RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 11":

Reactive Ion Etch System - 11" Electrode

1   F* Scotia, New York
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:
Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

1   Scotia, NY
4054
Plasma-Therm  

Plasma-Therm  

73/74 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:
Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems
1   Scotia, NY
11919
Plasma-Therm  

Plasma-Therm  

VII 734MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:
Plasmatherm RIE/Plasma Etch System
1   F* Scotia, NY
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

PLASMATHERM ICP PLASMA ETCHER:
Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
1   F* Scotia, NY
147470
Plasma-Therm  

Plasma-Therm  

790 PECVD 11" 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

PLASMATHERM PECVD 790:
Refurbished PECVD System with 11" Electrode
1   F* Scotia, NY

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.