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Cluster Plasma Tools


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List all 6 product types under Cluster Plasma ToolsList all 6 product types under Cluster Plasma Tools


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
256502
LAM Research Corp.  

LAM Research Corp.  

Allian 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   N* Villach, Carinthia
252024
Applied Materials  

Applied Materials  

200mm Centura II 

List all items of this typeCluster Plasma Tools - Other

in Cluster Plasma Tools

AMAT 200mm Centura II DXZx:

Centura MF II

Software: Vita Controller

Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage

Robot: HP+

Chamber:

A -> DPS+

B -> DPS+

C -> IPS

D -> ASP+

E -> Single Cooldown

F -> Orienter

1   Regensburg, Bavaria
256750
LAM Research Corp.  

LAM Research Corp.  

Alliance 9400 PTX 

List all items of this typeCluster Plasma Tools - Poly/Nitride

in Cluster Plasma Tools

LAM Alliance 9400 PTX:

Mainframe with 3 Plasmachambers

C-Upgrade in 2024

Mainframe and 2 Plasmachambers fully usable

1 Plasmachamber Hardware incomplete

1   N* Regensburg, Bavaria
255827
LAM Research Corp.  

LAM Research Corp.  

2300 Kiyo 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

Lam Kiyo Chamber L2301-B:

Semiconductor ETC Chamber with RF Cart

Incl. Gasbox and Rocker Valve

in production until January 2023
1   Villach, Carinthia
119294
Trion Technology  

Trion Technology  

Oracle 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:

Dielectric Cluster Tool


Trion Technology Oracle

1   F* Scotia, New York
126704
Ulvac  

Ulvac  

NE 7800 Ferroelectric Etcher 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

ULVAC FERROELECTRIC ETCHER:

Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.

 

1   F* Scotia, New York


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Cluster Plasma Tools:
Applied Materials, Inc., LAM Research Corp., Trion Technology, Ulvac