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LPCVD Furnaces


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
183418
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

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ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:

ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Serial Number: 2E0071-00-01


Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 Bagged & Skidded in warehouse.

Tool ID: FVX2561

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1   F* Malta, New York
183417
ASM  

ASM  

A412 Dual Reactor  

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ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:

ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Serial Number: 2E0061-00-01

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

 

Installed Idle.

2011 Vintage

 

Tool ID: FVX2560

1   F* Malta, New York
183169
ASM  

ASM  

A412 

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ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:

ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

Serial Number: 2E0082

2011 Vintage

1   F* Malta, New York
196930
ASM  

ASM  

A300 VT 

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ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation

Cold shutdown

Vintage 1997

S/N: 71F5669AE
1   F* Burlington, Vermont
196931
ASM  

ASM  

A300 VT 

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ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation



S/N: 71F5669AC







1   F* Burlington, Vermont
196932
ASM  

ASM  

A300 VT 

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ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation


Cold, Shutdown

S/N: 71F5669AE


1   F* Burlington, Vermont
137544
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Celsior mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

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Aviza Celsior mainframe:
Aviza Celsior mainframe



Aviza Celsior mainframe
Equipment Code: CVD304-04

LOCATION: Dresden
1   F* Regensburg, BY
137540
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Pantheon Mainframe for 12" / 300 mm 

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Aviza Pantheon Mainframe:
Aviza Pantheon Mainframe
Equipment Code: CVD304-03


Aviza Pantheon Mainframe with 3 chambers
Serial Number: OX0412-005
1   F* Regensburg, BY
190993
Kokusai  

Kokusai  

Quixace Ultimate 

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Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF:

Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

Low Temp Steam Anneal - for SOD Cure

S/N: T2DD6-18711

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1   Malta, New York
190748
Kokusai  

Kokusai  

DJ-1236VN-DF 

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Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N T2DC6-16590

ALD TiN

Tool is New In Box, with New Quartz.  Never installed.
1   Malta, New York
190749
Kokusai  

Kokusai  

DJ-1236VN-DF 

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Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N: T2DC6-16595

ALD TiN
1   Malta, New York
180506
Kokusai  

Kokusai  

DJ-1236VN-DF 

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Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF:

Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
TiCl4, NH3 - Process for TiN - Prior Use

Cartridge Heater - D4EX22250, RHC2 Heater
Number of control zone, 5 zones
Heater element material - KANTHAL APM
Maximum heating temperature range - 1050 degC (in Furnace)
Flat zone length - 800mm (±2.0 degC at 800 degC)
Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
Main Operation Unit - TM150-HKT05 
Sub Operation Unit - D4EX40577
Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
Bottle (For Ti Source) - BK1200URK, Made by Schumacher
N2 Purge Load Lock System
O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

PUMPS INCLUDED.  See Photo attached.

S/N: T2DC6-15901

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1   F* Dresden, Saxony
194725
Kokusai  

Kokusai  

DD-1206V-DF 

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Kokusai Quixace, 300mm, DD-1206V-DF:

Kokusai Quixace, 300mm, DD-1206V-DF

LP SiN 

S/N : T2DC6-13303

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1   Taichung, Taichung City
202834
Kokusai  

Kokusai  

DJ-1236VN-DF 

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Kokusai Quixace, 300mm, DD-1206V-DF:

Kokusai Quixace, 300mm, DD-1206V-DF

 

 

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1   F* Malta, New York
205376
Kokusai  

Kokusai  

DD-1206-DF 

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Kokusai Quixace, 300mm, DD-1206V-DF:
Kokusai Quixace, 300mm, DD-1206V-DF

In warehouse.  Bagged & Skidded

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1   Taichung, Taichung City
205395
Kokusai  

Kokusai  

 

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Kokusai Quixace, 300mm, DD-1206V-DF, LPCVD SiN:

Kokusai Quixace, 300mm,  DD-1206V-DF, LPCVD SiN

 

Bagged & Skidded in Warehouse

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1   F* Taichung, Taichung City
205396
Kokusai  

Kokusai  

DD-1206-DF 

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Kokusai Quixace, 300mm, DD-1206V-DF, LPCVD SiN:

Kokusai Quixace, 300mm, DD-1206V-DF, LPCVD SiN

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1   Taichung, Taichung City
190750
Kokusai  

Kokusai  

DD-1223VN 

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Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN:

Kokusai Quixace, 300mm, DD-1223VN

ALD-TiN 

S/N T2DC6-16441

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1   Malta, New York
204501
Kokusai  

Kokusai  

DJ-1206VN-DM, 

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Kokusai Quixace, 300mm, DJ-1206VN-DM,:

Kokusai Quixace, 300mm,

LPCVD SiN,

 

S/N : T2DC6-12825

Bagged & Skidded in warehouse

 

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1   Singapore
204500
Kokusai  

Kokusai  

DJ-1206VN-DM 

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Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN:

Kokusai Quixace, 300mm, DJ-1206VN-DM,

LPCVD SiN

S/N : T2DC6-12462

Bagged & Skidded in Warehouse

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1   Singapore
205392
Kokusai  

Kokusai  

DJ-1206VN-DM 

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Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN:

Kokusai Quixace, 300mm, DJ-1206VN-DM,  LP SiN 

 

Bagged & Skidded in Warehouse.

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1   Singapore
203084
Kokusai  

Kokusai  

DJ-1236VN-DF 

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Kokusai Quixace, 300mm, DJ-1236VN-DF, TiN_ALD:

Kokusai Quixace, 300mm, DJ-1236VN-DF, TiN_ALD

In fab. Idle.

 

 

1   F* Malta, New York
199768
Kokusai  

Kokusai  

Quixace-II 

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Kokusai Quixace, 300mm, Quixace-II:
Kokusai Quixace, 300mm, Quixace-II

Doped Poly




S/N: P2DC7-14115-1
1   Taichung, Taichung City
178278
Kokusai  

Kokusai  

Quixace 

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Kokusai, Quixace Ovens / Furnaces, 300mm:

Manufactured in 2007; Status: Bagged and Skidded
LPCVD Furnace  -  B-Doped Polysilicon
Tool is located in Taichung, Taiwan
S/N: P2DC7-14115-1

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1   Taichung, Taichung City
205391
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 

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SVG, AVP 8000 , 200mm Vertical Furnace, Cu Anneal:

SVG, AVP 8000 , 200mm Vertical Furnace, Cu Anneal

 

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1   F* Singapore
205236
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 AP 

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SVG, AVP 8000 AP, 200mm Vertical Furnace, Cu Anneal:

SVG, AVP 8000 AP, 200mm Vertical Furnace, Cu Anneal

 

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1   Singapore
205235
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 AP  

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SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Ox:

SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Ox

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1   Singapore
204517
Silicon Valley Group  

Silicon Valley Group  

VTR 7000 

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SVG, VTR 7000, 200mm, Arsenic TEOS, Furnace:

SVG, VTR 7000, 200mm, Arsenic TEOS, Furnace

 

S/N : V7B-326R

 

 

1   Burlington, Vermont
201292
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8 S 

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TEL Alpha 8 S, 200mm, Vertical Furnace, :

TEL Alpha 8 S, 200mm, Vertical Furnace, 

S/N :  300009665204

In Warehouse

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1   Singapore
201281
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8SE 

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TEL Alpha 8SE, HTO LPCVD , Furnace, 200mm:

TEL Alpha 8SE, HTO LPCVD , Furnace, 200mm

Bagged & Skidded in warehouse.

 

 

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1   Singapore
190746
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

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TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:
TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2
1   Malta, New York
190747
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

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TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:

TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2

1   Malta, New York
204919
Tokyo Electron Ltd  

Tokyo Electron Ltd  

INDY PLUS - IRAD 

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TEL Indy PLUS, IRAD, Oxide, Vertical Furnace, 300mm:

TEL Indy PLUS, IRAD, Oxide, Vertical Furnace, 300mm

Crated.  In warehouse.

S/N: S00001525089

 

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1   Malta, New York
202829
Tel  

Tel  

Indy Plus 

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TEL Indy PLUS, Vertical Furnace, 300mm:

TEL Indy PLUS, Vertical Furnace, 300mm

1   Malta, New York
202830
Tel  

Tel  

Indy Plus 

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TEL Indy PLUS, Vertical Furnace, 300mm:

TEL Indy PLUS, Vertical Furnace, 300mm

1   Malta, New York
202831
Tel  

Tel  

Indy Plus 

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TEL Indy PLUS, Vertical Furnace, 300mm:

TEL Indy PLUS, Vertical Furnace, 300mm

1   Malta, New York
202832
Tel  

Tel  

Indy Plus 

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TEL Indy PLUS, Vertical Furnace, 300mm:

TEL Indy PLUS, Vertical Furnace, 300mm

1   Malta, New York
202833
Tel  

Tel  

Indy Plus 

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TEL Indy PLUS, Vertical Furnace, 300mm:

TEL Indy PLUS, Vertical Furnace, 300mm

1   Malta, New York
178714
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy + 

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TEL Indy, Vertical Furnace, 300mm:

PSZ (Poly-Silazane) Cure Furnace, 300mm
Heater: FTP VOS-56-101P 4zone / RT-1100 (C) / with RCU
Process Condition: AP+Sub-AP
MAX Operating Temp: 900degC

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1   F* Taichung, Taichung City
202926
Tel  

Tel  

IndyPlus 

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TEL IndyPlus, Vertical Furnace, 300mm, MLD SiN Deposition:

TEL IndyPlus, Vertical Furnace, 300mm, MLD SiN Deposition

 

In the Fab.  Idle

1   F* Dresden, Saxony
202930
Tel  

Tel  

Indy Plus 

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1   Dresden, Saxony
202931
Tel  

Tel  

Indy Plus 

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TEL IndyPlus, Vertical Furnace, 300mm, MLD SiN Deposition:

TEL IndyPlus, Vertical Furnace, 300mm, MLD SiN Deposition

 

1   Dresden, Saxony
204301
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, DCS HTO:

TEL, Alpha 303i, 300mm Vertical Furnace, DCS HTO

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1   Singapore
204297
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly:

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly

1   Singapore
204298
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly:

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly

1   Singapore
204299
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly:

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly

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1   Singapore
204300
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly:

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly

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1   Singapore
204296
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, LP SiN:

TEL, Alpha 303i, 300mm Vertical Furnace, LP SiN

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1   Singapore
195346
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure:

TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure

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1   Taichung, Taichung City
204315
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly:

TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly

 

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1   Singapore
204295
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

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TEL, Alpha 303i, 300mm Vertical Furnace, PH3 Anneal:

TEL, Alpha 303i, 300mm Vertical Furnace, PH3 Anneal

Mid Temp

Bagged & Skidded in warehouse

1   Taichung, Taichung City


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under LPCVD Furnaces:
ASM, Aviza Technology Ltd., Kokusai, Silicon Valley Group, Tel, Tokyo Electronics Limited