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Vertical LPCVD Furnaces


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Item IDPhotoItem DescriptionSize RangeProc CapablitisMax TempCtlr Mfr/Mdl#PriceNotes Location
MakeModelSet Size
»ºF  »ºK  ºC$
196930 ASM A300 VT200 mmOxidation 1 F* Burlington, Vermont
196931 ASM A300 VT200 mm 1 F* Burlington, Vermont
196932 ASM A300 VT200 mm 1 F* Burlington, Vermont
183169 ASM A412300 mm 1 F* Malta, NY
183170 ASM A412300 mm 1 F* Malta, New York
183417 ASM A412 Dual Reactor 1 F* Malta, New York
183418 ASM A412 Dual Reactor 300 mm 1 F* Malta, New York
194725 Kokusai DD-1206V-DF 1 Taichung, Taichung City
190750 Kokusai DD-1223VN300 mm 1 Malta, New York
195356 Kokusai DJ-1206VN-DM 1 Singapore,
190748 Kokusai DJ-1236VN-DF300 mm 1 Malta, New York
190749 Kokusai DJ-1236VN-DF300 mm 1 Malta, New York
180506 Kokusai DJ-1236VN-DF300 mmLPCVD TiN 1 F* Dresden, Saxony
190993 Kokusai Quixace Ultimate300 mm 1 Malta, New York
191275 Silicon Valley Group AVP 8000 LP Poly200 mm 1 Singapore,
191277 Silicon Valley Group AVP 8000 LP TEOS200 mm 1 F* Singapore,
191258 Silicon Valley Group AVP 8000, AP, Forming Gas Anneal200 mm 1 Singapore,
191274 Silicon Valley Group AVP 8000, AP, Oxidation200 mm 1 Singapore,
191268 Silicon Valley Group AVP 8000, Gate Ox200 mm 1 Singapore,
195346 Tokyo Electron Ltd Alpha 303i 1 Taichung, Taichung City
195348 Tokyo Electron Ltd Alpha 303i 1 Taichung, Taichung City
199201 Tokyo Electron Ltd Alpha 303i 1 N* Singapore,
199202 Tokyo Electron Ltd Alpha 303i 1 N* Singapore,
187657 Tokyo Electron Ltd Alpha 8 S200 mm 1 Singapore,
178712 Tokyo Electron Ltd Indy +300 mm 1 Taichung, Taichung City
178714 Tokyo Electron Ltd Indy + 1 F* Taichung, Taichung City
194724 Tokyo Electron Ltd Indy Plus 1 Taichung, Taichung City
190746 Tokyo Electron Ltd IndyPlus300 mm 1 Malta, New York
190747 Tokyo Electron Ltd IndyPlus 1 Malta, New York
137566 Tokyo Electron Ltd OfenTel Minibatch (NITRID) for 12" / 300 mm300 mm 1 F* Regensburg, BY
137567 Tokyo Electron Ltd OfenTel Minibatch (OXID) for 12" / 300 mm300 mm 1 F* Regensburg, BY

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Vertical LPCVD Furnaces:
ASM, Kokusai, Silicon Valley Group, Tokyo Electronics Limited