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Chemical Vapor Deposition Equipment


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PLASMATHERM VLR 700


PLASMATHERM VLR 700


Single Chamber PECVD. Mixed Frequency Deposition
(MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz)
RF power delivered both electrodes.


Items from the following manufacturers are offered under Chemical Vapor Deposition Equipment:
AG Associates, Applied Materials, Inc., ASM, Astex, Carbone, Dockweiler Chemicals, Kokusai, LAM Research Corp., Materials Technology, Nexx Systems, Novellus Systems, Oxford Instruments, Plasma-Therm, Tel, Tokyo Electronics Limited