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Lithography Equipment


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List all 20 product types under Lithography EquipmentList all 20 product types under Lithography Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
13097
AB-M Inc.  

AB-M Inc.  

IR Wafer Aligner 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

AB-M INC. IR WAFER ALIGNER STATION:

IR Wafer Aligner Station

1   Scotia, New York
89964
AIO Microservice  

AIO Microservice  

8826 

List all items of this typeRobotic PR Coater Tracks

in Photoresist Coater Tracks

AIO MICROSERVICE DUAL TRACK COAT SYSTEM:

Dual Track Coat System

1   F* Scotia, New York
257175
AMAT  

AMAT  

Verity2 SEM 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   N* Singapore
254474
ASML  

ASML  

AT400C 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Singapore
254366
ASML  

ASML  

AT850C 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Singapore
254365
ASML  

ASML  

AT850C 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Singapore
254257
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254256
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254107
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254111
ASML  

ASML  

XT1400E 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Singapore
254110
ASML  

ASML  

XT1900Gi 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

ASML XT1900Gi, 300mm, s/n: 5884:

Immersion scanner

1   Singapore
254199
ASML  

ASML  

Yieldstar S-200B 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Dresden, Saxony
254167
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
254164
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
254163
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

AXCELIS PCU 200, 200mm, s/n: PU6C289X:

PHOTOSTABILIZER

1   Singapore
254165
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
254166
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
44185
Suss MicroTec  

Suss MicroTec  

RESPECT 600 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

BLE RESPECT AUTOMATIC PHOTORESIST COATER:

Automatic Photoresist Coater
 


System is designed exclusively to coat and bake substrates
using spinning and heating techniques.

BLE was acquired by Suss Microtec

1   F* Scotia, New York
44184
Suss MicroTec  

Suss MicroTec  

Respect 600 

List all items of this typeManual Photoresist Developers

in Photoresist Developers

BLE RESPECT AUTOMATIC PHOTORESIST DEVELOPER:


System is designed exclusively to develop and bake substrates
using spinning and heating techniques

BLE was acquired by Suss Microtec

1   F* Scotia, New York
77000
Brewer Science  

Brewer Science  

CEE 4000 

List all items of this typeRobotic PR Coater Tracks

in Photoresist Coater Tracks

BREWER SCIENCE INC. PROGRAMMABLE AUTOMATED COAT/BAKE TRACK SYSTEM:
Programmable Automated Coat/Bake Track System
2   F* Scotia, NY
250700
Canon  

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Only for sale for an competetive price!

 

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
250701
Canon  

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
41529
Headway  

Headway  

CB15 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

HEADWAY RESEARCH MANUAL PHOTORESIST SPIN COATER:

Manual Photoresist Spin Coater

1   F* Scotia, New York
9971
Headway  

Headway  

P8X20-30 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

Headway Research P8X20-30:
AC Spindle Motor for AC-101 Photoresist Spinner, New
1   Plano, TX
254473
InnerSense  

InnerSense  

Load Port - P/N: ALP613A 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Dresden, Saxony
254364
InnerSense  

InnerSense  

Load Port - P/N: ALP613A 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Dresden, Saxony
112607
Karl Suss  

Karl Suss  

MA 150M 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

KARL SUSS MANUAL MASK ALIGNER 150 MM:

Manual Mask Aligner

The Karl Suss MA 150M Manual Mask Aligner is a mask alignment and exposure system which offers
unsurpassed precision and versatility when handling wafers up to 150 mm in diameter.

1   F* Scotia, New York
253369
KLA-Tencor  

KLA-Tencor  

5200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Burlington, Vermont
254368
KLA-Tencor  

KLA-Tencor  

TERON 650 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Malta, New York
254226
Lasertec  

Lasertec  

BI100 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Lasertec BI100, s/n: BA002A408JR:

EUV Reticle Back Side Inspection

1   Malta, New York
257163
Nikon  

Nikon  

NSR-S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Dresden, Saxony
257165
Nikon  

Nikon  

NSR-S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Dresden, Saxony
257164
Nikon  

Nikon  

NSR-S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Dresden, Saxony
254329
Nikon  

Nikon  

S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Singapore
248319
Nikon  

Nikon  

NSR-2205EX14C 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

Nikon, NSR-2205EX14C, 200mm, S/N 7573113:

Nikon, NSR-2205EX14C, 200mm, S/N 7573113

1   Singapore
248320
Nikon  

Nikon  

NSR-2205EX14C 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

Nikon, NSR-2205EX14C, 200mm, S/N 7573120:

Nikon, NSR-2205EX14C, 200mm, S/N 7573120

1   Singapore
249907
Nikon  

Nikon  

NSR-S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

NIKON, NSR-S208D, 300mm, s/n: 8732039. LKSC760:

NIKON Main Body

1   Singapore
247027
Nikon  

Nikon  

NSR-S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

NIKON, NSR-S208D, 300mm, s/n: 8732048:

NIKON, NSR-S208D, 300mm, s/n: 8732048

Lithography Step and repeat scanning system

1   Dresden, Saxony
247605
Nikon  

Nikon  

NSR-S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

NIKON, NSR-S208D, 300mm, s/n: S62 0290202:

Lithography Step and repeat scanning system

1   Dresden, Saxony
160264
Quintel  

Quintel  

Q-804 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

QUINTEL MASK ALIGNER/EXPOSURE SYSTEM:

Mask Aligner/Exposure System

1   Scotia, New York
24564
Quintel  

Quintel  

UL 7000 IR 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

QUINTEL-NEUTRONIX MASK ALIGNER 200 MM:

Mask Aligner with IR Backside Alignment

Quintel acquired by Neutronix

1   F* Scotia, New York
4005
Solitec  

Solitec  

820-CB 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

SOLITEC AUTOMATIC TWO-STATION PHOTORESIST COAT & BAKE:

Automatic Two-station
Photoresist Coat & Bake


Designed to coat and soft
bake semiconductor wafers.

1   F* Scotia, New York
5026
Solitec  

Solitec  

5110SJC 

List all items of this typeManual Photoresist Developers

in Photoresist Developers

SOLITEC SCRUBBER/HI PRESSURE SPRAY:

Scrubber/Hi Pressure Spray

1   F* Scotia, New York
4007
Solitec  

Solitec  

820-PTDB 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

SOLITEC TEMPERATURE CONTROLLED POSITIVE DEVELOPER:

Temperature Controlled Positive
Developer with Hot Plate Bake


Designed to develop and hard
bake semiconductor wafers.

1   F* Scotia, New York
206300
Specialty Coating  

Specialty Coating  

P3201 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

SPECIALTY COATING SYSTEMS DIP COATER:

Dip Coater

1 7,752.08 Scotia, New York
206539
Specialty Coating  

Specialty Coating  

G3-8 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

SPECIALTY COATING SYSTEMS SPIN COATER 8":

Spin Coater

1 4,501.21 Scotia, New York
249036
Suss MicroTec  

Suss MicroTec  

ACS200 Gen3 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

Suss ACS200 Gen3, sn: ACS300GEN2-001151, 300 mm:

Suss ACS200 Gen3, sn: ACS300GEN2-001151, 300 mm

Suss spray coater

1   East Fishkill, New York
42108
Suss MicroTec  

Suss MicroTec  

FALCON - ACS 200 

List all items of this typeAutomated Coating and Developing Cluster System

in Photoresist Coater/Developers

SUSS MICROTEC FALCON ACS 200:

Fully Automated High Throughput Coating, Developing Cluster System

 

System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.

1   F* Scotia, New York
154092
Silicon Valley Group  

Silicon Valley Group  

8136 

List all items of this typePhotoresist Curing Tools

in Photoresist Tools

SVG SILICON VALLEY GROUP SINGLE TRACK HOT PLATE OVEN:

Single Track Hot Plate Oven

Silicon Valley Group 8136

1   Scotia, New York
131377
Tamarack Scientific  

Tamarack Scientific  

Contact Mask Exposure 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

Tamarack Scientific Mask Aligner:
Contact Mask Exposure System
1   F* Plano, TX
254475
Tel  

Tel  

ACT12 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
254137
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
250840
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
250841
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
250847
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
254477
Tel  

Tel  

LITHIUS PRO-I 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
254106
Tel  

Tel  

Lithius ProV 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Malta, New York
254101
Tel  

Tel  

Lithius ProVi 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL Lithius ProVi, 300mm, s/n: V110231:

Immersion Coat and Develop

1   Malta, New York
254102
Tel  

Tel  

Lithius ProVi 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL Lithius ProVi, 300mm, s/n: V110233:

Immersion Coat and Develop

1   Malta, New York
254103
Tel  

Tel  

Lithius ProVi 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL Lithius ProVi, 300mm, s/n: V120318:

Immersion Coat and Develop

1   Malta, New York
254240
Tel  

Tel  

Lithius ProVi 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Malta, New York
255441
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Dresden, Saxony
257159
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL LITHIUS, 300mm, s/n: MD-G360588:

2-Block-Machine

1   N* Dresden, Saxony
257160
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL LITHIUS, 300mm, s/n: MD-G360844:

2-Block-Machine

1   N* Dresden, Saxony
255442
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Dresden, Saxony
255443
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Dresden, Saxony
257161
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL LITHIUS, 300mm, s/n: MDG360846:

2-Block-Machine

1   N* Dresden, Saxony
251087
Tel  

Tel  

MARK8 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
250488
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A1
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 Last Time in production 1/1/24

 

1   Dresden, Saxony
250489
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

Last Time in production 1/1/24

 

1   Dresden, Saxony
250490
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

1   Dresden, Saxony
250491
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#2
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Shinwa CP-I
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 

Last time in production: 01.01.24

1   Dresden, Saxony
254104
Tel  

Tel  

PROi 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL PROi, 300mm, s/n: N100355:

Cot / DEV

1   Dresden, Saxony
257162
Tel  

Tel  

ProZ 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   N* Malta, New York
254241
Tel  

Tel  

ProZ 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Malta, New York
249204
Tokyo Electron Limit  

Tokyo Electron Limit  

LITHIUS I+ 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL, LITHIUS I+, 300mm, S/N G481358:

TEL, LITHIUS I+, 300mm, S/N G481358

1   Singapore
233207
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Lithius 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL, Lithius, 300mm, S/N G260815:

TEL, Lithius, 300mm, S/N G260815

1   Singapore
245289
Tokyo Electron Limit  

Tokyo Electron Limit  

8181523 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

TEL, Mark 8, 200mm, S/N 8181523:

TEL, Mark 8, 200mm, S/N 8181523

SOG Coater. 2 coaters only.

1   Singapore


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Lithography Equipment:
AB-M Inc., AIO Microservice, AMAT, ASML, Axcelis Technologies GmbH, Brewer Science, Canon, Headway, InnerSense, Karl Suss, KLA-Tencor, Lasertec, Nikon, Nikon, Quintel, Silicon Valley Group, Solitec, Specialty Coating Systems, Suss MicroTec, Tamarack Scientific, Tel, Tokyo Electron Limited, Tokyo Electronics Limited