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Wafer Steppers


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List all 4 product types under Wafer SteppersList all 4 product types under Wafer Steppers


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
180601
ASML  

ASML  

/300 

List all items of this typeDeep UV Wafer Stepper

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1   F* Temecula, California
ASML /300 DUV Stepper - 6":
ASML /300 - DUV Wafer Stepper - 6" Wafer
Refurbished condition, Lens data taken before decommissioning shows good lens quality.
Currently decomissioned, not available for testing.
Lens under N2 Purge, unit stored in cleanroom.
201146
ASML  

ASML  

PAS5500 /100D 

List all items of this typeI-Line Wafer Stepper

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1   Singapore
ASML PAS 5500 - /100D, iLine Stepper, 200mm:
ASML PAS 5500 - /100D, iLine Stepper, 200mm

onLine

S/N : 8846
201148
ASML  

ASML  

PAS5500 /100D 

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1   Singapore
ASML PAS 5500 - /100D, iLine Stepper, 200mm:
ASML PAS 5500 - /100D, iLine Stepper, 200mm

S/N : 8550

OnLine in the Fab
201147
ASML  

ASML  

PAS5500 /100D 

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1   Singapore
ASML PAS 5500/1100, 200mm, 193nm, Scanner:
ASML PAS 5500/1100, 200mm, 193nm, Scanner

S/N : 8217  NOTE: Serial Number on the Configuration is incorrect. 


Deinstalled Dec 2016 

199718
ASML  

ASML  

PAS5500 /1100 

List all items of this typeDeep UV Wafer Stepper

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1   Burlington, Vermont
ASML PAS 5500/1100, 200mm, 193nm, Scanner:



ASML 193nm 5500/1100 Scanner
192501
Brewer Science  

Brewer Science  

300x 

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1   Malta, New York
Brewer Science, 300 X, Resist Coater/Developer, 300mm:
Brewer Science,  300 X, Resist Coater/Developer, 300mm

Resist Coater
192500
Brewer Science  

Brewer Science  

CEE 2000 FX 

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1   Malta, New York
Brewer Science, CEE 200 FX, Resist Coater, 300mm:
Brewer Science, CEE 200 FX, Resist Coater, 300mm

photoresist coater

197661
Canon  

Canon  

FPA-1550 M4-W 

List all items of this typeG-Line Wafer Steppers

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1   F* Villach, Carinthia
195725
Cymer  

Cymer  

EX-5700 

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1   F* Burlington, Vermont
Cymer, EX-5700, DUV Laser, 248nm, :
Cymer, EX-5700, DUV Laser, 248nm,  

for Nikon NSR-2205Ex14/12 248nm Steppers

S/N : 96CC701812

DOM : 1996
195726
Cymer  

Cymer  

EX-5700 

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1   F* Burlington, Vermont
Cymer, EX-5700, DUV Laser, 248nm, :
Cymer, EX-5700, DUV Laser, 248nm,  

for Nikon NSR-2205Ex14/12 248nm Steppers

S/N : 97CC703710

DOM : 1997
197418
Nikon  

Nikon  

NSR-2205EX14C 

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1   Singapore
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper:
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper

Bagged & Skidded in Warehouse
199682
Nikon  

Nikon  

NSR-2205EX14C 

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1   Singapore
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper:
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper
195529
Nikon  

Nikon  

NSR-S620D 

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1   F* Dresden, Saxony
Nikon, NSR-S620D, 300mm, ArF Immersion Scanner:
Nikon, NSR-S620D, 300mm, ArF Immersion Scanner

Laser is a Cymer Laser 
 
Laser Model: XLR-640IX 
SN: 41391 
Software Version: 12.8.1
NERD+GLX Option 
NAFFA
 
The Tool is still in production
192499
Quintel  

Quintel  

7000 

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1   Malta, New York
QUINTEL, 7000, Mask Aligner, 300mm:
QUINTEL, 7000, Mask Aligner, 300mm

contact mask aligner
180602
Ultratech, Inc.  

Ultratech, Inc.  

1500 

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1   F* Regensburg, BY
Ultratech 1500 - Wafer Stepper - 6":
Used Ultratech 1500 - 6" Wafer Stepper


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Steppers:
ASML, Brewer Science, Canon, Cymer, Nikon, Nikon, Quintel, Ultratech, Inc.