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Thermal Processing Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
217150
AET Technologies  

AET Technologies  

Rapid Annealing Furnace 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

AET TECHNOLOGIES Rapid Annealing Furnace:

AET TECHNOLOGIES Rapid Annealing Furnace

  • 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
  • EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
  • EUROTHERM 7300A Three Phase Power Controller
  • LEYBOLD TTR 91 S Thermovac Vacuum Sensor
  • LEYBOLD Display One Single Channel Vacuum Gauge Display
  • VAT 24428-KA31 Pneumatic HV Right Angle Valve
  • TELSTAR RD-9 Vacuum Pump
  • HORIBA SEC-E40 Mass Flow Meter
  • HORIBA ROD-1 MB Modular Readout
  • Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
  • Heating power: 50kW
  • Input Power: 380-400VAC; 3Ph; 50Hz 125A
1   Plano, Texas
236583
AG Associates  

AG Associates  

Heatpulse 410 

List all items of this typeBenchtop RTP Tools

in Rapid Thermal Processing Equipment

AG ASSOCIATES Heatpulse 410 Benchtop Rapid Thermal Annealing Tool:

AG ASSOCIATES Heatpulse 410 Rapid Thermal Processor

  • Serial Number 1K7043 
  • Single Wafer Process
  • Single Rotometer Controlled Gas Channel
  • Multi-Step Process Cycle Capability
  • Programmable Ramp-Up Rates from 10ºC-250ºC/sec.
  • 450 - 1150ºC Recommended Operating Temp Range; 1,250ºC Peak Temperature
  • Thermocouple Temperature Control
  • 1-300 Seconds Processing Cycle
  • PC Controller with pCat Software
  • 208V, 3Ph, 60Hz, 90A Input Power
  • Price: ………………………………………………….……..………..$ 29,500.00
1 29,507.91 Plano, Texas
255502
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Advance - OFENV06C:

ASM Furnace Vertical - Advance 400

2 Reactors atmospheric

 

1   Villach, Carinthia
255500
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV01D:

OFENV01D
Furnace with 2 Tubes

1x Reactor Dot. Poly Low Pressure

1x Reactor Atmosphere WET-OXID

1   Villach, Carinthia
255501
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV05C:

ASM Furnace Vertical - Advance 400

2 Reactor atmospheric

Robot defect and need service 

1   Villach, Carinthia
255503
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV06D:

ASM Furnace Vertical - Advance 400

2x Reactor Dot. Poly Low Pressure

1   Villach, Carinthia
255504
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV07C:

ASM Furnace Vertical 

2 Reactor atmospheric

Reactor 1 is missing heater cassette, Motor driver, Board and loader arm

 

1   Villach, Carinthia
252342
Hitachi Kokusai Elec  

Hitachi Kokusai Elec  

Quixace - DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
254361
Hitachi Kokusai Elec  

Hitachi Kokusai Elec  

Quixace - DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
249038
Tel  

Tel  

Indy IRAD 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

TEL, Indy IRAD, 300mm, s/n: R00000895110, TEL Furnace:

TEL, Indy IRAD, 300mm, s/n: R00000895110, TEL Furnace

1   East Fishkill, New York
249039
Tel  

Tel  

Indy IRAD 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

TEL, Indy IRAD, 300mm, s/n: R00001065058, TEL NIT HIK FURNACE:

TEL, Indy IRAD, 300mm, s/n: R00001065058, TEL NIT HIK FURNACE

1   East Fishkill, New York
50992
Canary Technology  

Canary Technology  

CT 3533-130 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

THERMCO/TEMPRESS TUBE FURNACE:

Six Pack Tube Furnace consisting of one three stack 4" capable and one 6" capable three stack furnace

Two three stack Thermco furnace banks sharing one laminar flow, bulk head mount, manual pull station with Tempress Model 263 Controllers.
Left side bank was refurbished and upgraded(Canary Tech.) to 150mm capable MRL Black Max heating elements with one year of use.

Furnace will be sold AS IS WHERE IS

1   F* Scotia, New York
133220
Zircar  

Zircar  

FX2254 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

ZIRCAR HEATER MODULE 1300°C:

Furnace Tube

Zircar HTMOD FX2254

1   F* Scotia, New York


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Thermal Processing Equipment:
AET Technologies, AG Associates, ASM, Canary Technology, Hitachi Kokusai Elec, Tel, Zircar