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Thermal Processing Equipment


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List all 12 product types under Thermal Processing EquipmentList all 12 product types under Thermal Processing Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
3502
AG Associates  

AG Associates  

2101 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates 2101:
Rapid Thermal Processing System for 3"-5" Wafers
3322
AG Associates  

AG Associates  

2106 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates 2106:
Rapid Thermal Processing System
189869
AG Associates  

AG Associates  

610 

List all items of this typeBenchtop RTP Tools

in Rapid Thermal Processing Equipment

1   Plano, Texas
AG Associates 610 Rapid Thermal Processor:
AG Associates 610 Rapid Thermal Processor
  • Benchtop System for up to 6" Wafers
  • PCAT Control System
111094
AG Associates  

AG Associates  

210M 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates Heatpulse 210M:
Rapid Thermal Implant Monitor
49891
AG Associates  

AG Associates  

Heatpulse 2146 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates Heatpulse 2146:
Single Chamber Rapid Thermal Processor PARTS TOOL ONLY
51726
AG Associates  

AG Associates  

410 Controller Only 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates Heatpulse 410:
CONTROLLER ONLY
42890
AG Associates  

AG Associates  

2146 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Scotia, NY
AG ASSOCIATES SINGLE CHAMBER RTP TOOL:
Single Chamber RTP Tool
201153
Applied Materials In  

Applied Materials In  

Centura RTP XE 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Singapore
Applied Materials, Centura RTP XE, MOD1, 200mm:
Applied Materials, Centura RTP XE, MOD1, 200mm<br /><br />2 Chamber, SMIF<br /><br />On line in the fab.<br /><br />S/N: ;;2979
201133
Applied Materials  

Applied Materials  

Vantage 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Dresden, Saxony
Applied Materials, Vantage, Vulcan, RTP, 300mm :
Applied Materials, Vantage,  Vulcan, Spike RTP, 300mm 
2 Chamber System

S/N : 426995
201134
Applied Materials  

Applied Materials  

Vantage Vulcan 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Dresden, Saxony
Applied Materials, Vantage, Vulcan, RTP, 300mm :
Applied Materials, Vantage, Vulcan, RTP, 300mm 
2 Chamber System

S/N : 429402
183418
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Serial Number: 2E0071-00-01


Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

183417
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Serial Number: 2E0061-00-01

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183169
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

Serial Number: 2E0082

2011 Vintage
183170
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

Serial Number : 2E0066

2011 Vintage

 

Tool ID: FVX2540

 
196930
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Burlington, Vermont
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation

Cold shutdown

Vintage 1997

S/N: 71F5669AE
196931
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Burlington, Vermont
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation



S/N: 71F5669AC







196932
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Burlington, Vermont
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation


Cold, Shutdown

S/N: 71F5669AE


137544
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Celsior mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Celsior mainframe:
Aviza Celsior mainframe



Aviza Celsior mainframe
Equipment Code: CVD304-04

LOCATION: Dresden
137540
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Pantheon Mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Pantheon Mainframe:
Aviza Pantheon Mainframe
Equipment Code: CVD304-03


Aviza Pantheon Mainframe with 3 chambers
Serial Number: OX0412-005
133149
Kokusai  

Kokusai  

2950704 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 4,200.00 F* Scotia, NY
KOKUSAI DIFFUSION FURNACE TUBE:
Horizontal Diffusion Furnace Tube
Unused Surplus


Kokusai 2950704
199835
Kokusai  

Kokusai  

BDF41 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   Villach, Carinthia
Kokusai Furnance BDF41:
4 Tubes
Tube 1      Oxid
Tube 2+3  Teos
Tube 4      Poly
190993
Kokusai  

Kokusai  

Quixace Ultimate 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF:

Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

Low Temp Steam Anneal - for SOD Cure

S/N: T2DD6-18711

190748
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N T2DC6-16590

ALD TiN

Tool is New In Box, with New Quartz.  Never installed.
190749
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N: T2DC6-16595

ALD TiN
180506
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Dresden, Saxony
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF:
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
TiCl4, NH3 - Process for TiN - Prior Use

Cartridge Heater - D4EX22250, RHC2 Heater
Number of control zone, 5 zones
Heater element material - KANTHAL APM
Maximum heating temperature range - 1050 degC (in Furnace)
Flat zone length - 800mm (±2.0 degC at 800 degC)
Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
Main Operation Unit - TM150-HKT05 
Sub Operation Unit - D4EX40577
Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
Bottle (For Ti Source) - BK1200URK, Made by Schumacher
N2 Purge Load Lock System
O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

PUMPS INCLUDED.  See Photo attached.

S/N: T2DC6-15901
194725
Kokusai  

Kokusai  

DD-1206V-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
Kokusai Quixace, 300mm, DD-1206V-DF:
Kokusai Quixace, 300mm, DD-1206V-DF

LP SiN 

S/N : T2DC6-13303

!!! MULTIPLE UNITS AVAILABLE !!!  Please inquire
190750
Kokusai  

Kokusai  

DD-1223VN 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN:
Kokusai Quixace, 300mm, DD-1223VN

ALD-TiN 

S/N T2DC6-16441
195356
Kokusai  

Kokusai  

DJ-1206VN-DM 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN:
Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN

S/N : T1DC6-13301

Tool is Crated in warehouse in Singapore.

!!!Multiple Units Available!!!  Please inquire
199768
Kokusai  

Kokusai  

Quixace-II 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
Kokusai Quixace, 300mm, Quixace-II:
Kokusai Quixace, 300mm, Quixace-II

Doped Poly




S/N: P2DC7-14115-1
195492
Levitech  

Levitech  

Levitor RTP 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Malta, New York
Levitech, Levitor RTP, 300mm:
Levitech, Levitor RTP, 300mm
199766
Mattson Technology  

Mattson Technology  

Helios 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Taichung, Taichung City
Mattson, Helios, 300mm, RTP:

Mattson, Helios, 300mm, RTP
S/N: 2005061077

157047
Modular Process Tech  

Modular Process Tech  

RTP-600xp 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Plano, TX
MPT (Modular Process Technology) RTP-600xp:
Rapid Thermal Processing System
4856
MRL Industries  

MRL Industries  

1024 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   F* Plano, TX
MRL Industries 1024:
3-Tube Horizontal Diffusion Furnace w/Cantilever Loaders
133147
MRL Industries  

MRL Industries  

400-920047 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 4,200.00 F* Scotia, NY
MRL INDUSTRIES DIFFUSION FURNACE TUBE:
Black Max Horizontal Diffusion Furnace Tube
Unused Surplus


MRL Industries 400-920047
91036
MRL Industries  

MRL Industries  

400-918104 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

2 3,500.00 F* Scotia, NY
MRL INDUSTRIES FURNACE TUBE:
Furnace Tube
91174
MRL Industries  

MRL Industries  

400-902959 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 3,500.00 Scotia, NY
MRL INDUSTRIES FURNACE TUBE:
Furnace Tube
191258
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, AP, Forming Gas Anneal 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
SVG, AVP 8000 AP, 200mm Vertical Furnace:

SVG, AVP 8000 AP, 200mm Vertical Furnace

S/N: 4272

Cu Anneal (Single Boat)

191268
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, Gate Ox 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation:
SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

Thermal Gate Oxideation furnace

S/N: 4252
191275
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP Poly 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD Poly:
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Poly (Plain Poly)

S/N: 4257
191277
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP TEOS 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore
SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD TEOS:
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD TEOS

S/N: 4425
191274
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, AP, Oxidation 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
SVG, AVP 8000 LP, 200mm Vertical Furnace, Oxidation:
SVG, AVP 8000 LP, 200mm Vertical Furnace, Oxidation

S/N: 4409


199735
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8 S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
TEL Alpha 8 S, 200mm, Vertical Furnace, Forming Gas Anneal:
TEL Alpha 8 S, 200mm, Vertical Furnace, Forming Gas Anneal

Major parts missing.

Wafer transfer F/B motor1/pc
Wafer transfer F/B timing belt1/pc
Wafer transfer forks 1/Set
CONTACTOR,MAGNETIC..SD-N80 DC24V1/pc
TRANSFORMER..CB-L-1 P200V S24V 1/pc
Spike TC 2/pc


In the fab.

S/N: A00009770123
187657
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8 S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride:
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride

S/N: A00000015042

Bagged and Skidded in Warehouse
190746
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:
TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2
190747
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:

TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2

178714
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy + 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Taichung, Taichung City
TEL Indy, Vertical Furnace, 300mm:
PSZ (Poly-Silazane) Cure Furnace, 300mm
Heater: FTP VOS-56-101P 4zone / RT-1100 (C) / with RCU
Process Condition: AP+Sub-AP
MAX Operating Temp: 900degC

201646
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Dresden, Saxony
TEL, Alpha 303i, 300mm Vertical Furnace, Cu Anneal:
TEL, Alpha 303i, 300mm Vertical Furnace, Cu Anneal

S/N : L000004Z5315

In the fab - Idle
201647
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Dresden, Saxony
TEL, Alpha 303i, 300mm Vertical Furnace, Cu Anneal:
TEL, Alpha 303i, 300mm Vertical Furnace, Cu Anneal

S/N : L00000515014

In the Fab.  Idle
199201
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
TEL, Alpha 303i, 300mm Vertical Furnace, Low Temp:

TEL, Alpha 303i, 300mm Vertical Furnace, Low Temp

Bagged & Skidded in Warehouse

195346
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure:
TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure
195348
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly:
TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly

S/N : L00000735083


199202
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
TEL, Alpha 303i, 300mm Vertical Furnace, SiN:
TEL, Alpha 303i, 300mm Vertical Furnace, SiN

Bagged & Skidded in Warehouse

!!! Multiple Units Availalbe !!!
199739
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S ZA 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
TEL, Alpha 8S ZA, 200mm, Vertical Furnace, HLD:
TEL, Alpha 8S ZA, 200mm, Vertical Furnace, HLD

Major Parts Missing

S/N: A00009855308
199740
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S ZA 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore
TEL, Alpha 8S ZA, 200mm, Vertical Furnace, HLD:
TEL, Alpha 8S ZA, 200mm, Vertical Furnace, HLD

Major Parts Missing.

In the fab.


143599
Thermco  

Thermco  

122688-001 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   Scotia, NY
THERMCO FURNACE TUBE:
Furnace Tube

Thermco 122688-001

Unused surplus

189872
Thermco  

Thermco  

TMX-9000 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   Plano, Texas
Thermco TMX-9000 Furnace Control System:
Thermco TMX-9000 Furnace Control System
  • 4ea Separate Tube Controllers
50992
Canary Technology  

Canary Technology  

CT 3533-130 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   F* Scotia, NY
THERMCO/TEMPRESS TUBE FURNACE:
Six Pack Tube Furnace consisting of one three stack 4" capable and one 6" capable three stack furnace

Two three stack Thermco furnace banks sharing one laminar flow, bulk head mount, manual pull station with Tempress Model 263 Controllers.
Left side bank was refurbished and upgraded(Canary Tech.) to 150mm capable MRL Black Max heating elements with one year of use.

Furnace will be sold AS IS WHERE IS

3890
Thermtech  

Thermtech  

15310SC 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 6,750.00 F* Scotia, NY
THERMTEC DIFFUSION FURNACE:
Diffusion Furnace
199836
Yes Ofen PB-6-8P 
Yes Ofen PB-6-8P 

List all items of this typeThermal Processing Equipment - Other

in Thermal Processing Equipment

1   Villach, Carinthia
Yes Ofen PB-6-8P:
Furnance with 4 Chambers.
133220
Zircar  

Zircar  

FX2254 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 4,200.00 F* Scotia, NY
ZIRCAR HEATER MODULE 1300°C:
Furnace Tube

Zircar HTMOD FX2254


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Thermal Processing Equipment:
AG Associates, Applied Materials Inc., Applied Materials, Inc., ASM, Aviza Technology Ltd., Canary Technology, Kokusai, Levitech, Mattson Technology, Modular Process Technology, MRL Industries, Silicon Valley Group, Thermco, Thermtech, Tokyo Electronics Limited, Zircar