SP203 (6'')
SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;
3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:
Maintank; Chemistry Controller-Dos Wafer Size Range
Minimum: 150 mm
Maximum:150 mm
Set Size: 150 mm
Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;
- No Spare Parts available
- dismantling date: We can dismantle the tool in May 2026
- Expected date of availability for the buyer: July 2026
1 unit @ Best Price
MAKE: SEZ
MODEL: SP203 (SM202-6-B)
CATEGORY: Other Wet Process Equipment
SELLER: Infineon
Villach, Austria
SPECS
| Manufacturer | SEZ |
| Model | SP203 (SM202-6-B) |
| Description | SP203 with 3 Chemisty Cabinets |
| Accessories | ISIS Controller (2.0.0.06.38-0159) and Measuring head (SN 2.0.0.07.14_01557) Cables are no longer available. |
| Other Information | The Tool was modified to allow the chemistry to be applied over it |
| Power Requirements | 200-208 V 50.0 A 50/60 Hz 3 Phase |
| Year of Manufacture | 1998 |
| Condition | Fair |