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Single Chamber RTP Tools


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Item IDPhotoItem DescriptionDescriptionCass to Cass#PriceNotes Location
MakeModel
$
217150 AET Technologies Rapid Annealing FurnaceAET TECHNOLOGIES Rapid Annealing Furnace 1 Plano, Texas
111094 AG Associates 210MRapid Thermal Processing System 1 F* Plano, TX
42890 AG Associates 2146Single Chamber RTP ToolYES 1 F* Scotia, New York
219252 AMAT, Centura XE+, 200mm, S/N R573Implant Anneal RTP 1 Singapore
201133 Applied Materials VantageSingle Chamber RTP 1 F* Dresden, Saxony
201134 Applied Materials Vantage VulcanSingle Chamber RTP 1 F* Dresden, Saxony
203102 Applied Materials Vantage Vulcan300mm RTP 1 Singapore
209643 Axcelis Technologies Summit300mm RTP 1 East Fishkill, New York
209907 Axcelis Technologies Summit RTPRTP Processor 1 East Fishkill, New York
201495 Mattson Technology Helios300mm RTP 1 Singapore
208211 Mattson Technology MILLIOS Millisecond Anneal System 1 Malta, New York
220101 Ultratech Stepper LSA100ASpike anneal 1 N* Dresden, Saxony

NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.
Items from the following manufacturers are offered under Single Chamber RTP Tools:
AET Technologies, AG Associates, Applied Materials, Inc., Axcelis Technologies GmbH, Mattson Technology, Ultratech Stepper