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FULL DESCRIPTION of Item 257523

in Epitaxial Cluster Tools
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 257523

Offered 1 Offered at Best Price


EPI 39 - AMAT EPI CENTURA

Software Ver: B6.50

CB1 Amps: 300A

Vita Controller

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

 Standard pneumatic waferlift

Center Finding System: OTF

Buffer robot: HP+

Piezocon sensor: No

VSB: Yes

Wide Body LL

Tool called "EPI39"

EPI 39 - AMAT EPI CENTURA
  Click to see additional image(s)... other images

Location: Villach, Kärnten
Unit Price Unstated
Number of Units 1
Manufacturer AMAT
Model AMAT EPI CENTURA
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 150 mm
Number of Chambers 3
Controller Type Other Controller Type
Cassette to Cassette YES
Extended Description  Details at Konfiguration und Part list EPI39.xlsx
Power Requirements 480 V     120.0 A     50 Hz     3 Phase
Year of Manufacture 2006
Condition Good

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
IFAT FE PV PCS MNT LS
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria