Axcelis GSD 180E2 (#817)
Disk-Drive:Direct-DriveDose-Type:RegularSource-Type:ELS4 IHC-Source without VaporizerHighvoltage-Transformer:both OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSUN Solaris AXI 3HE (special case)Second-WorkstationSUN Sparc5 on cart with printerSoftware-Version:6.4.3 (no license included)Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 Cell TypeOptions:Accel-Higvoltage Probe installedConditiontool run fully productive (24/7) between 15 and 160kv Energy until we switched it off on 03/2026AvailabilityImmediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. depending on the availability of external service providersNotes:slight corrosion spots(rusty) on the frame, just a visual matter Clean-Room Table on frontside missing 0,5L Xe-Plasma-Bottle Holder missing + Terminal Water Cover missing HPES-Upgrade installed, but Upgrades were stoped after HPES-Upgrade! Rough-Pumps and Disk-Chiller not included modified Gasbox-Frame for 6L-Bottles modified Plasma-Gun Power-Supply installed(TDK) Minor modifications on tool: like interlocks,... No Manual-Set/ no Spares If required, tool can be inspected on site
1 unit @ Best Price
MAKE: Axcelis/Eaton
MODEL: GSD 180E2
CATEGORY: High Current Implanters
SELLER: Infineon
Regensburg, Germany
SPECS
| Manufacturer | Axcelis/Eaton |
| Model | GSD 180E2 |
| Description | Highcurrent Implanter (AsH3, BF3) |
| Accessories | see discription above |
| Other Information | see description above |
| Condition | Good |
| Year of Manufacture | 1995 |
| Refurbished | YES |
| Power Requirements | 208 V 50.0 A 50/60 Hz 3 Phase |
| CE Marked | YES |
| Exterior Dimensions | |
| Width | 125.984 in (320.0 cm) |
| Depth | 236.220 in (600.0 cm) |
| Height | 102.362 in (260.0 cm) |
| Weight | 29,762 lb (13,500 kg) |
S&H
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
Payment
100% downpayment