ASML Twinscan AT /1100 Wafer Scanner
ASML Twinscan AT 1100 Wafer Scanner
- Cymer Nanolith 7600A 193 nm ArF Laser System
- Dual 300mm Wafer Stages
- FOUP Loadport & Open Cassette Wafer Handling
- 3ea Water Chillers Included
- All Air Handling Equipment Included
- Tool is Removed from Service and Ready for Crating
1 unit @ Best Price
MAKE: ASML
MODEL: Twinscan AT /1100
CATEGORY: Wafer Steppers: Deep UV
SELLER: Catalyst Equipmt Co
Austin, TX US
SPECS
| Manufacturer | ASML |
| Model | Twinscan AT /1100 |
| Wafer Size Range | |
| Minimum | 200 mm |
| Maximum | 300 mm |
| Set Size | 300 mm |
| Wafer Handler Size Range | |
| Minimum | 200 mm |
| Maximum | 300 mm |
| Set Size | 300 mm |
| Wafer Handling | Random Access Robot |
| Reticle Plate Size | 6'' x 6'' |
| Illuminator Model Number | Cymer NL 7600A |
| Controller Type | PC/VME |
| Interfaced to PR Track | YES |
| Environmental Enclosure Provided | YES |
| Accessories | Extraction Unit |
| Condition | Very Good |
| Power Requirements | 230/460 V 50/60 Hz |
| CE Marked | YES |
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