About Us Contact Us Terms & Conditions
Serving  Our Guest Log in    Register to bid, list, and tradeHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Cluster Plasma Tools    View    Search-by-Specs    Input    Edit    

FULL DESCRIPTION of Item 262166

in Cluster Plasma Tools - Other
Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas
 
Item ID: 262166

Offered 1 Offered at Best Price


LAM RESEARCH 2300 Dielectric/Metal Etch Tool

LAM RESEARCH 2300 Dielectric/Metal Etch Tool

  • 2300 Platform V2 Etch Transfer Module
    • 3ea 200mm Open Cassette Loadports
    • Front & Side User Interface Monitors
    • CDM Wafer Handling Robot
  • 2300 Exelan Flex45 Dielectric Etch Process Module
    • OES 2 End Point Detection
    • Low Temperature ESC
    • Boce 2700 LPM Turbo Pump
    • 16 Regulated Gas Channels
  • Versys HP Metal Etch Process Module
    • OES 2 End Point Detection
    • Boce 2200 LPM Turbo Pump
    • 16 Regulated Gas Channels
  • Microwave Stripper Process Module
    • On Board Gas System
    • 3 Regulated Gas Channels
  • Manufactured in 2023
  • Unused Since Installation/Qualification
  • All Pumps, Generators & Other Subsystems Included
  • PLEASE CONTACT US FOR FURTHER INFORMATION
LAM RESEARCH 2300 Dielectric/Metal Etch Tool
  Click to see additional image(s)... other images

Location: Tokyo, Tokyo
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model 2300
Wafer Size Range 
  Minimum 200 mm
  Maximum 300 mm
  Set Size 200 mm
Number of Chambers 3
Process Capabilities Dielectric Etch/Metal Etch/Microwave Strip
CE Marked YES
Year of Manufacture 2023
Condition Like New

OFFERED BY:
(click name below to visit its website directly)
Catalyst Equipment Corporation
Plano , Texas
+1.972.943.0808
 


Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas