Unit Price |
Unstated |
Number of Units |
1 |
Manufacturer | Rigaku |
Model | TXRF 300S |
Wafer Size Range |  |
Minimum | 150 mm |
Maximum | 300 mm |
Cassette to Cassette | YES |
Xray Source Specifications | X Ray Tube Water cooled diffraction x-ray tube Target: Au Electron gun: W filament Focusing size: .4 x 12 mm on the target Maximum load: 1.2kW |
Accessories | Oxford Detector: Model: 7043 Det. area 80 mm2 Window Be Resolution at 5.9 KeV is 175 eV Bias -500V |
Other Information | System Includes: Ebara Dry Pump: Model A10S Haskris Chiller: Model RW100F1 Oxford Instruments: Model 7043 UBS Industries: Model LLC-203 Liquid Level controller |
Extended Description |
Details at specifications.pdf |
Year of Manufacture | 2001 |
Power Requirements | 208 V
50/60 Hz
3 Phase
|
Exterior Dimensions |  |
Width | 67.000 in (170.2 cm) |
Depth | 48.000 in (121.9 cm) |
Height | 62.000 in (157.5 cm) |
Weight | 2,092 lb (949 kg) |