| Voltage: | 208V |
| Cryo-Pumps: | CTI/Edwards Onboard: OB-8 + OB-10 |
| Cryo-Kompressor: | CTI 9650 Low-Voltage |
| Source-Turbo-Pump: | Seiko/Edwards STPA2203C |
| Beamline-Turbo Pump: | Oerlikon MAG W 1300 C |
| Terminal-Rough-Pump: | without (Edwards IGX Config) |
| Endstation Rough-Pump: | without (Edwards IGX Config) |
| Wafersize: | 200mm |
| Disk-Type: | Si-coated Disk |
| Wafer-Cooling: | no Disk-Chiller included ! |
| Gasbox: | 5-String, 4x 2L Size |
| String1: | KrH2 High-Pressure Type VCR 1/4"; MFC Brooks GF120 10sccm-N2 |
| String2: | BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 |
| String3: | AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 |
| String4: | PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; |
| String5: | Argon Carriergas; MFC Brooks GF120 10sccm-N2 |
| Disk-Drive: | Direct-Drive |
| Dose-Type: | Power-Dose |
| Source-Type: | ELS4 IHC-Source without Vaporizer |
| Highvoltage-Transformer Source: | Oil |
| Highvoltage-Transformer Terminal: | Oil |
| Light-Tower: | red/yellow/green; no buzzer |
| Main-Workstation | SUN Solaris SX1500 4HE |
| Remote-Workstation | SUN Solaris Axi 3HE (special case) |
| Software-Version: | 8.2.1 (no license included) |
| Network: | 24port 100MB Ethernet with Cisco Router-Kit |
| Cell-Controller: | V6 Type |
| Condition | tool run fully productive (24/7) between 15 and 160kv Energy until we switched it off on 01/2025 |
| Availability | Immediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. depending on the availability of external service providers |
| Notes: | Clean-Room Table on frontside missing |
| | Disk-Removal Tool + Disk-Cart is missing |
| | Disk-Chiller not included |
| | Rough-Pumps not included |
| | Minor modifications on tool like Interlock Type |
| | No Manual-Set/ no Spares included |
| | If required, tool can be inspected on site, but no Power actually |
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